Design of Micro-Plates Subjected to Residual Stresses in Microelectromechanical Systems (MEMS) Applicationss
Microelectromechanical Systems (MEMS) devices suffer from reliability problems which affect its performance. Fabrication process initiate residual stresses that cause stress stiffening and curling. It is shown from the previous research that reducing both stiffening and curling is a challenging issu...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Port Said University
2021-09-01
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| Series: | Port Said Engineering Research Journal |
| Subjects: | |
| Online Access: | https://pserj.journals.ekb.eg/article_147396_0e15d56c710c5f00b3c555303e4233eb.pdf |