High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

The scale factor drifts and other long-term instability drifts of Micro-Electro-Mechanical System (MEMS) inertial sensors are the main contributors of the position and orientation errors in high dynamic environments. In this paper, a novel high dynamic micro vibrator, which could provide high accele...

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Bibliographic Details
Main Authors: Yi-Jia Du, Ting-Ting Yang, Dong-Dong Gong, Yi-Cheng Wang, Xiang-Yu Sun, Feng Qin, Gang Dai
Format: Article
Language:English
Published: MDPI AG 2018-06-01
Series:Sensors
Subjects:
in-situ self-calibration
6-DOF
micro vibrator
integrated optical detector
high-dynamic
Online Access:http://www.mdpi.com/1424-8220/18/7/2055

Internet

http://www.mdpi.com/1424-8220/18/7/2055

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