Quantitative Exposure Assessment of Various Chemical Substances in a Wafer Fabrication Industry Facility

Quantitative Exposure Assessment of Various Chemical Substances in a Wafer Fabrication Industry Facility

Objectives: This study was designed to evaluate exposure levels of various chemicals used in wafer fabrication product lines in the semiconductor industry where work-related leukemia has occurred. Methods: The research focused on 9 representative wafer fabrication bays among a total of 25 bays in a...

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Bibliographic Details
Main Authors:	Hyunhee Park, Jae-Kil Jang, Jung-Ah Shin
Format:	Article
Language:	English
Published:	Elsevier 2011-03-01
Series:	Safety and Health at Work
Subjects:	Semiconductor Carcinogen Reproductive toxin Hematologic toxicity Benzene Arsine
Online Access:	http://www.sciencedirect.com/science/article/pii/S2093791111210060

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