Influence of substrate temperature on the crystalline quality of AlN layers deposited by RF reactive magnetron sputtering
Aluminum nitride (AlN) is a promising material for use in applications such as ultraviolet light-emitting diodes and surface acoustic wave devices. In this study, AlN layers were fabricated on nitrided sapphire substrates using radio-frequency (RF) reactive magnetron sputtering. An AlN layer sputter...
| المؤلفون الرئيسيون: | , , |
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| التنسيق: | مقال |
| اللغة: | English |
| منشور في: |
AIP Publishing LLC
2015-01-01
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| سلاسل: | AIP Advances |
| الوصول للمادة أونلاين: | http://dx.doi.org/10.1063/1.4906796 |