Design and optimization of differential capacitive micro accelerometer for vibration measurement
This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity e...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2021-05-01
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| Series: | Journal of the Mechanical Behavior of Materials |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/jmbm-2021-0003 |
| _version_ | 1818744665303678976 |
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| author | Gomathi Kumar Balaji Arunachalam Mrunalini Thangaraj |
| author_facet | Gomathi Kumar Balaji Arunachalam Mrunalini Thangaraj |
| author_sort | Gomathi Kumar |
| collection | DOAJ |
| description | This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%. |
| first_indexed | 2024-12-18T02:47:55Z |
| format | Article |
| id | doaj.art-d999ab90e67740218414000adf9e9836 |
| institution | Directory Open Access Journal |
| issn | 0334-8938 2191-0243 |
| language | English |
| last_indexed | 2024-12-18T02:47:55Z |
| publishDate | 2021-05-01 |
| publisher | De Gruyter |
| record_format | Article |
| series | Journal of the Mechanical Behavior of Materials |
| spelling | doaj.art-d999ab90e67740218414000adf9e98362022-12-21T21:23:31ZengDe GruyterJournal of the Mechanical Behavior of Materials0334-89382191-02432021-05-01301192710.1515/jmbm-2021-0003Design and optimization of differential capacitive micro accelerometer for vibration measurementGomathi Kumar0Balaji Arunachalam1Mrunalini Thangaraj2Mechatronics Engineering, Kongu Engineering College, Perundurai, Tamilnadu, 638060, IndiaMechatronics Engineering, Kongu Engineering College, Perundurai, Tamilnadu, 638060, IndiaElectronics and Instrumentation Engineering, Kongu Engineering College, Perundurai, Tamilnadu, 638060, IndiaThis paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.https://doi.org/10.1515/jmbm-2021-0003memscapacitive accelerometeru-folded suspensionminitab 17 softwareintellisuite 8.6 software |
| spellingShingle | Gomathi Kumar Balaji Arunachalam Mrunalini Thangaraj Design and optimization of differential capacitive micro accelerometer for vibration measurement Journal of the Mechanical Behavior of Materials mems capacitive accelerometer u-folded suspension minitab 17 software intellisuite 8.6 software |
| title | Design and optimization of differential capacitive micro accelerometer for vibration measurement |
| title_full | Design and optimization of differential capacitive micro accelerometer for vibration measurement |
| title_fullStr | Design and optimization of differential capacitive micro accelerometer for vibration measurement |
| title_full_unstemmed | Design and optimization of differential capacitive micro accelerometer for vibration measurement |
| title_short | Design and optimization of differential capacitive micro accelerometer for vibration measurement |
| title_sort | design and optimization of differential capacitive micro accelerometer for vibration measurement |
| topic | mems capacitive accelerometer u-folded suspension minitab 17 software intellisuite 8.6 software |
| url | https://doi.org/10.1515/jmbm-2021-0003 |
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