Non-invasive digital etching of van der Waals semiconductors

Non-invasive digital etching of van der Waals semiconductors

Here, the authors exploit a non-invasive layer-bylayer etching technique to fabricate electronic devices based on 2D transition metal dichalcogenides with controlled thickness and transport properties comparable to those of exfoliated flakes.

Bibliographic Details
Main Authors: Jian Zhou, Chunchen Zhang, Li Shi, Xiaoqing Chen, Tae Soo Kim, Minseung Gyeon, Jian Chen, Jinlan Wang, Linwei Yu, Xinran Wang, Kibum Kang, Emanuele Orgiu, Paolo Samorì, Kenji Watanabe, Takashi Taniguchi, Kazuhito Tsukagoshi, Peng Wang, Yi Shi, Songlin Li
Format: Article
Language:English
Published: Nature Portfolio 2022-04-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-022-29447-6

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