In‐plane epitaxial growth of 2D CoSe‐WSe2 metal‐semiconductor lateral heterostructures with improved WSe2 transistors performance

Abstract The two‐dimensional (2D) in‐plane (lateral) heterostructures have attracted increasing interest for potential applications in the atomically thin electronics and optoelectronics. While most studies focus on semiconductor‐semiconductor lateral heterostructures with highly similar lattice str...

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Main Authors: Huifang Ma, Kejing Huang, Ruixia Wu, Zhengwei Zhang, Jia Li, Bei Zhao, Chen Dai, Ziwei Huang, Hongmei Zhang, Xiangdong Yang, Bo Li, Yuan Liu, Xiangfeng Duan, Xidong Duan
Format: Article
Language:English
Published: Wiley 2021-02-01
Series:InfoMat
Subjects:
Online Access:https://doi.org/10.1002/inf2.12157
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author Huifang Ma
Kejing Huang
Ruixia Wu
Zhengwei Zhang
Jia Li
Bei Zhao
Chen Dai
Ziwei Huang
Hongmei Zhang
Xiangdong Yang
Bo Li
Yuan Liu
Xiangfeng Duan
Xidong Duan
author_facet Huifang Ma
Kejing Huang
Ruixia Wu
Zhengwei Zhang
Jia Li
Bei Zhao
Chen Dai
Ziwei Huang
Hongmei Zhang
Xiangdong Yang
Bo Li
Yuan Liu
Xiangfeng Duan
Xidong Duan
author_sort Huifang Ma
collection DOAJ
description Abstract The two‐dimensional (2D) in‐plane (lateral) heterostructures have attracted increasing interest for potential applications in the atomically thin electronics and optoelectronics. While most studies focus on semiconductor‐semiconductor lateral heterostructures with highly similar lattice structures between the constituent components, the synthesis of metal‐semiconductor lateral heterostructures is much less explored and usually more challenging due to more distinct lattice structures or chemical properties. Herein, a vapor phase epitaxy growth method of high‐quality metal‐semiconductor lateral heterostructures between tetragonal CoSe and hexagonal WSe2 is reported. The 2D CoSe can selectively nucleate at the edge of pre‐grown WSe2 nanosheets to form CoSe‐WSe2 metal‐semiconductor lateral heterostructures. Optical microscopy (OM), scanning electron microscopy (SEM), and atomic force microscopy (AFM) studies reveal distinct contrast across the heterostructure interface. High‐resolution transmission electron microscopy (HRTEM) and selected area electron diffraction (SAED) studies further confirm the microstructure modulation across the heterostructure interface. The field‐effect transistors (FETs) of CoSe‐WSe2 lateral heterostructures show satisfactory Ohmic contacts and considerably better FET performance over those with deposited Cr/Au contacts, suggesting the in‐plane metal‐semiconductor junctions may function as improved contacts for the atomically thin electronics.
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spelling doaj.art-d9e9f248bc2f49459592b8dc8119eeb62022-12-21T23:02:10ZengWileyInfoMat2567-31652021-02-013222222810.1002/inf2.12157In‐plane epitaxial growth of 2D CoSe‐WSe2 metal‐semiconductor lateral heterostructures with improved WSe2 transistors performanceHuifang Ma0Kejing Huang1Ruixia Wu2Zhengwei Zhang3Jia Li4Bei Zhao5Chen Dai6Ziwei Huang7Hongmei Zhang8Xiangdong Yang9Bo Li10Yuan Liu11Xiangfeng Duan12Xidong Duan13Hunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaHunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaHunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaHunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaHunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaHunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaHunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaHunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaHunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaHunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaDepartment of Applied Physics, School of Physics and Electronics Hunan University Changsha ChinaDepartment of Applied Physics, School of Physics and Electronics Hunan University Changsha ChinaDepartment of Chemistry and Biochemistry University of California Los Angeles California USAHunan Key Laboratory of Two‐Dimensional Materials and State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering Hunan University Changsha ChinaAbstract The two‐dimensional (2D) in‐plane (lateral) heterostructures have attracted increasing interest for potential applications in the atomically thin electronics and optoelectronics. While most studies focus on semiconductor‐semiconductor lateral heterostructures with highly similar lattice structures between the constituent components, the synthesis of metal‐semiconductor lateral heterostructures is much less explored and usually more challenging due to more distinct lattice structures or chemical properties. Herein, a vapor phase epitaxy growth method of high‐quality metal‐semiconductor lateral heterostructures between tetragonal CoSe and hexagonal WSe2 is reported. The 2D CoSe can selectively nucleate at the edge of pre‐grown WSe2 nanosheets to form CoSe‐WSe2 metal‐semiconductor lateral heterostructures. Optical microscopy (OM), scanning electron microscopy (SEM), and atomic force microscopy (AFM) studies reveal distinct contrast across the heterostructure interface. High‐resolution transmission electron microscopy (HRTEM) and selected area electron diffraction (SAED) studies further confirm the microstructure modulation across the heterostructure interface. The field‐effect transistors (FETs) of CoSe‐WSe2 lateral heterostructures show satisfactory Ohmic contacts and considerably better FET performance over those with deposited Cr/Au contacts, suggesting the in‐plane metal‐semiconductor junctions may function as improved contacts for the atomically thin electronics.https://doi.org/10.1002/inf2.121572D atomic crystalschemical vapor depositionfield‐effect transistorslateral heterostructuresmetal‐semiconductor contacts
spellingShingle Huifang Ma
Kejing Huang
Ruixia Wu
Zhengwei Zhang
Jia Li
Bei Zhao
Chen Dai
Ziwei Huang
Hongmei Zhang
Xiangdong Yang
Bo Li
Yuan Liu
Xiangfeng Duan
Xidong Duan
In‐plane epitaxial growth of 2D CoSe‐WSe2 metal‐semiconductor lateral heterostructures with improved WSe2 transistors performance
InfoMat
2D atomic crystals
chemical vapor deposition
field‐effect transistors
lateral heterostructures
metal‐semiconductor contacts
title In‐plane epitaxial growth of 2D CoSe‐WSe2 metal‐semiconductor lateral heterostructures with improved WSe2 transistors performance
title_full In‐plane epitaxial growth of 2D CoSe‐WSe2 metal‐semiconductor lateral heterostructures with improved WSe2 transistors performance
title_fullStr In‐plane epitaxial growth of 2D CoSe‐WSe2 metal‐semiconductor lateral heterostructures with improved WSe2 transistors performance
title_full_unstemmed In‐plane epitaxial growth of 2D CoSe‐WSe2 metal‐semiconductor lateral heterostructures with improved WSe2 transistors performance
title_short In‐plane epitaxial growth of 2D CoSe‐WSe2 metal‐semiconductor lateral heterostructures with improved WSe2 transistors performance
title_sort in plane epitaxial growth of 2d cose wse2 metal semiconductor lateral heterostructures with improved wse2 transistors performance
topic 2D atomic crystals
chemical vapor deposition
field‐effect transistors
lateral heterostructures
metal‐semiconductor contacts
url https://doi.org/10.1002/inf2.12157
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