On the Evolution of Stress and Microstructure in Radio Frequency-Sputtered Lead-Free (Ba,Ca)(Zr,Ti)O<sub>3</sub> Thin Films

On the Evolution of Stress and Microstructure in Radio Frequency-Sputtered Lead-Free (Ba,Ca)(Zr,Ti)O<sub>3</sub> Thin Films

Thin-film piezoelectrics are widely investigated for actuators and energy harvesters, but there are few alternatives to toxic lead zirconate titanate. Biocompatible Ca- and Zr-modified BaTiO<sub>3</sub> (BCZT) is one of the most promising lead-free alternatives due to its high piezoelect...

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Bibliographic Details
Main Authors: Runar Plünnecke Dahl-Hansen, Marit Synnøve Sæverud Stange, Tor Olav Sunde, Johan Henrik Ræder, Per Martin Rørvik
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Actuators
Subjects:
lead-free piezoelectrics
thin films
RF sputtering
residual stress
structural integrity
energy harvesting
Online Access:https://www.mdpi.com/2076-0825/13/3/115

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