Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring

Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring

In this study, a ZnO nanorods (NRs) patterned MEMS piezoresistive silicon micro-cantilever was fabricated as environmental monitor. The fabrication starts from bulk silicon, utilizing photolithography, diffusion, inductively coupled plasma (ICP) cryogenic dry etching, Zinc DC-sputtering, and chemica...

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Bibliographic Details
Main Authors: Jiushuai Xu, Maik Bertke, Alaaeldin Gad, Feng Yu, Gerry Hamdana, Andrey Bakin, Erwin Peiner
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
MEMS
Micro-cantilever
ZnO nanorods
seed layer
environmental sensor
Online Access:https://www.mdpi.com/2504-3900/1/4/290
Description
Summary:In this study, a ZnO nanorods (NRs) patterned MEMS piezoresistive silicon micro-cantilever was fabricated as environmental monitor. The fabrication starts from bulk silicon, utilizing photolithography, diffusion, inductively coupled plasma (ICP) cryogenic dry etching, Zinc DC-sputtering, and chemical bath deposition (CBD) etc. This sensor shows a humidity sensitivity value of 6.35 ± 0.27 ppm/RH% at 25 °C in the range from 30% RH to 80% RH.
ISSN:2504-3900

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