Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring
In this study, a ZnO nanorods (NRs) patterned MEMS piezoresistive silicon micro-cantilever was fabricated as environmental monitor. The fabrication starts from bulk silicon, utilizing photolithography, diffusion, inductively coupled plasma (ICP) cryogenic dry etching, Zinc DC-sputtering, and chemica...
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| Format: | Article |
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MDPI AG
2017-08-01
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| Series: | Proceedings |
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| Online Access: | https://www.mdpi.com/2504-3900/1/4/290 |
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| author | Jiushuai Xu Maik Bertke Alaaeldin Gad Feng Yu Gerry Hamdana Andrey Bakin Erwin Peiner |
| author_facet | Jiushuai Xu Maik Bertke Alaaeldin Gad Feng Yu Gerry Hamdana Andrey Bakin Erwin Peiner |
| author_sort | Jiushuai Xu |
| collection | DOAJ |
| description | In this study, a ZnO nanorods (NRs) patterned MEMS piezoresistive silicon micro-cantilever was fabricated as environmental monitor. The fabrication starts from bulk silicon, utilizing photolithography, diffusion, inductively coupled plasma (ICP) cryogenic dry etching, Zinc DC-sputtering, and chemical bath deposition (CBD) etc. This sensor shows a humidity sensitivity value of 6.35 ± 0.27 ppm/RH% at 25 °C in the range from 30% RH to 80% RH. |
| first_indexed | 2024-04-12T21:33:59Z |
| format | Article |
| id | doaj.art-daed17fe652748a7ac73b1f4bb7c6557 |
| institution | Directory Open Access Journal |
| issn | 2504-3900 |
| language | English |
| last_indexed | 2025-03-20T06:21:54Z |
| publishDate | 2017-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj.art-daed17fe652748a7ac73b1f4bb7c65572024-10-02T15:02:55ZengMDPI AGProceedings2504-39002017-08-011429010.3390/proceedings1040290proceedings1040290Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental MonitoringJiushuai Xu0Maik Bertke1Alaaeldin Gad2Feng Yu3Gerry Hamdana4Andrey Bakin5Erwin Peiner6TU Braunschweig, Department of Semiconductor Technology, Braunschweig, GermanyTU Braunschweig, Department of Semiconductor Technology, Braunschweig, GermanyTU Braunschweig, Department of Semiconductor Technology, Braunschweig, GermanyTU Braunschweig, Department of Semiconductor Technology, Braunschweig, GermanyTU Braunschweig, Department of Semiconductor Technology, Braunschweig, GermanyTU Braunschweig, Department of Semiconductor Technology, Braunschweig, GermanyTU Braunschweig, Department of Semiconductor Technology, Braunschweig, GermanyIn this study, a ZnO nanorods (NRs) patterned MEMS piezoresistive silicon micro-cantilever was fabricated as environmental monitor. The fabrication starts from bulk silicon, utilizing photolithography, diffusion, inductively coupled plasma (ICP) cryogenic dry etching, Zinc DC-sputtering, and chemical bath deposition (CBD) etc. This sensor shows a humidity sensitivity value of 6.35 ± 0.27 ppm/RH% at 25 °C in the range from 30% RH to 80% RH.https://www.mdpi.com/2504-3900/1/4/290MEMSMicro-cantileverZnO nanorodsseed layerenvironmental sensor |
| spellingShingle | Jiushuai Xu Maik Bertke Alaaeldin Gad Feng Yu Gerry Hamdana Andrey Bakin Erwin Peiner Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring Proceedings MEMS Micro-cantilever ZnO nanorods seed layer environmental sensor |
| title | Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring |
| title_full | Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring |
| title_fullStr | Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring |
| title_full_unstemmed | Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring |
| title_short | Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring |
| title_sort | fabrication of zno nanorods on mems piezoresistive silicon microcantilevers for environmental monitoring |
| topic | MEMS Micro-cantilever ZnO nanorods seed layer environmental sensor |
| url | https://www.mdpi.com/2504-3900/1/4/290 |
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