Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging
Abstract With the rapid evolution of microelectronics and nanofabrication technologies, the feature sizes of large‐scale integrated circuits continue to move toward the nanoscale. There is a strong need to improve the quality and efficiency of integrated circuit inspection, but it remains a great ch...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2022-04-01
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| Series: | Advanced Science |
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| Online Access: | https://doi.org/10.1002/advs.202103902 |
| _version_ | 1818278749568761856 |
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| author | Tianyao Zhang Haibo Yu Jialin Shi Xiaoduo Wang Hao Luo Daojing Lin Zhu Liu Chanmin Su Yuechao Wang Lianqing Liu |
| author_facet | Tianyao Zhang Haibo Yu Jialin Shi Xiaoduo Wang Hao Luo Daojing Lin Zhu Liu Chanmin Su Yuechao Wang Lianqing Liu |
| author_sort | Tianyao Zhang |
| collection | DOAJ |
| description | Abstract With the rapid evolution of microelectronics and nanofabrication technologies, the feature sizes of large‐scale integrated circuits continue to move toward the nanoscale. There is a strong need to improve the quality and efficiency of integrated circuit inspection, but it remains a great challenge to provide both rapid imaging and circuit node‐level high‐resolution images simultaneously using a conventional microscope. This paper proposes a nondestructive, high‐throughput, multiscale correlation imaging method that combines atomic force microscopy (AFM) with microlens‐based scanning optical microscopy. In this method, a microlens is coupled to the end of the AFM cantilever and the sample‐facing side of the microlens contains a focused ion beam deposited tip which serves as the AFM scanning probe. The introduction of a microlens improves the imaging resolution of the AFM optical system, providing a 3–4× increase in optical imaging magnification while the scanning imaging throughput is improved ≈8×. The proposed method bridges the resolution gap between traditional optical imaging and AFM, achieves cross‐scale rapid imaging with micrometer to nanometer resolution, and improves the efficiency of AFM‐based large‐scale imaging and detection. Simultaneously, nanoscale‐level correlation between the acquired optical image and structure information is enabled by the method, providing a powerful tool for semiconductor device inspection. |
| first_indexed | 2024-12-12T23:22:23Z |
| format | Article |
| id | doaj.art-db070fa813f741dea82df600015d96df |
| institution | Directory Open Access Journal |
| issn | 2198-3844 |
| language | English |
| last_indexed | 2024-12-12T23:22:23Z |
| publishDate | 2022-04-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advanced Science |
| spelling | doaj.art-db070fa813f741dea82df600015d96df2022-12-22T00:08:14ZengWileyAdvanced Science2198-38442022-04-01912n/an/a10.1002/advs.202103902Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale ImagingTianyao Zhang0Haibo Yu1Jialin Shi2Xiaoduo Wang3Hao Luo4Daojing Lin5Zhu Liu6Chanmin Su7Yuechao Wang8Lianqing Liu9State Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016 P. R. ChinaState Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016 P. R. ChinaState Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016 P. R. ChinaState Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016 P. R. ChinaState Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016 P. R. ChinaState Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016 P. R. ChinaState Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016 P. R. ChinaState Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016 P. R. ChinaState Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016 P. R. ChinaState Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016 P. R. ChinaAbstract With the rapid evolution of microelectronics and nanofabrication technologies, the feature sizes of large‐scale integrated circuits continue to move toward the nanoscale. There is a strong need to improve the quality and efficiency of integrated circuit inspection, but it remains a great challenge to provide both rapid imaging and circuit node‐level high‐resolution images simultaneously using a conventional microscope. This paper proposes a nondestructive, high‐throughput, multiscale correlation imaging method that combines atomic force microscopy (AFM) with microlens‐based scanning optical microscopy. In this method, a microlens is coupled to the end of the AFM cantilever and the sample‐facing side of the microlens contains a focused ion beam deposited tip which serves as the AFM scanning probe. The introduction of a microlens improves the imaging resolution of the AFM optical system, providing a 3–4× increase in optical imaging magnification while the scanning imaging throughput is improved ≈8×. The proposed method bridges the resolution gap between traditional optical imaging and AFM, achieves cross‐scale rapid imaging with micrometer to nanometer resolution, and improves the efficiency of AFM‐based large‐scale imaging and detection. Simultaneously, nanoscale‐level correlation between the acquired optical image and structure information is enabled by the method, providing a powerful tool for semiconductor device inspection.https://doi.org/10.1002/advs.202103902atomic force microscopy (AFM)correlative microscopymicrolensmicrosphereoptical imaging |
| spellingShingle | Tianyao Zhang Haibo Yu Jialin Shi Xiaoduo Wang Hao Luo Daojing Lin Zhu Liu Chanmin Su Yuechao Wang Lianqing Liu Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging Advanced Science atomic force microscopy (AFM) correlative microscopy microlens microsphere optical imaging |
| title | Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging |
| title_full | Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging |
| title_fullStr | Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging |
| title_full_unstemmed | Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging |
| title_short | Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging |
| title_sort | correlative afm and scanning microlens microscopy for time efficient multiscale imaging |
| topic | atomic force microscopy (AFM) correlative microscopy microlens microsphere optical imaging |
| url | https://doi.org/10.1002/advs.202103902 |
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