Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator

Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator

Novel Si-based nanosize mechanical resonator has been top-down fabricated. The shape of the resonating body has been numerically derived and consists of seven star-polygons that form a fractal structure. The actual resonator is defined by focused ion-beam implantation on a SOI wafer where its 18 ver...

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Bibliographic Details
Main Authors: Vassil Tzanov, Jordi Llobet, Francesc Torres, Francesc Perez-Murano, Nuria Barniol
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Nanomaterials
Subjects:
NEMS
fractal structure
self-similarity
nanoresonator
broadband frequency spectrum
nonlinearity
Online Access:https://www.mdpi.com/2079-4991/10/4/811

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