Sensitive Element of Microaccelerometer on Surface Acoustic Waves for Measuremant of Superhigh Accelerations

The article presents the main shortcomings of the sensitive element of the micromechanical accelerometer on surface acoustic waves, developed earlier at the Department of Laser Measuring and Navigation Systems ETU. Solutions for elimination of deficiencies are offered. The merits of the proposed des...

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Main Authors: Sergei Shevchenko, Mariya Khivrich, Alexander Kukaev
Format: Article
Language:English
Published: FRUCT 2018-11-01
Series:Proceedings of the XXth Conference of Open Innovations Association FRUCT
Subjects:
Online Access:https://fruct.org/publications/abstract23/files/She.pdf
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author Sergei Shevchenko
Mariya Khivrich
Alexander Kukaev
author_facet Sergei Shevchenko
Mariya Khivrich
Alexander Kukaev
author_sort Sergei Shevchenko
collection DOAJ
description The article presents the main shortcomings of the sensitive element of the micromechanical accelerometer on surface acoustic waves, developed earlier at the Department of Laser Measuring and Navigation Systems ETU. Solutions for elimination of deficiencies are offered. The merits of the proposed design of a sensitive element for measuring super large accelerations are described. The strength of the materials and the design of the sensitive element was evaluated.
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spelling doaj.art-db3a229cb4cc4c20ad45e5ca0aea67272022-12-21T23:40:15ZengFRUCTProceedings of the XXth Conference of Open Innovations Association FRUCT2305-72542343-07372018-11-0160223532537Sensitive Element of Microaccelerometer on Surface Acoustic Waves for Measuremant of Superhigh AccelerationsSergei Shevchenko0Mariya Khivrich1Alexander Kukaev2St. Petersburg State Electrotechnical University "ETU", St. Petersburg, RussiaSt. Petersburg State Electrotechnical University "ETU", St. Petersburg, RussiaSt. Petersburg State Electrotechnical University "ETU", St. Petersburg, RussiaThe article presents the main shortcomings of the sensitive element of the micromechanical accelerometer on surface acoustic waves, developed earlier at the Department of Laser Measuring and Navigation Systems ETU. Solutions for elimination of deficiencies are offered. The merits of the proposed design of a sensitive element for measuring super large accelerations are described. The strength of the materials and the design of the sensitive element was evaluated.https://fruct.org/publications/abstract23/files/She.pdf Micromechanical accelerometersurface acoustic wavessensitive element
spellingShingle Sergei Shevchenko
Mariya Khivrich
Alexander Kukaev
Sensitive Element of Microaccelerometer on Surface Acoustic Waves for Measuremant of Superhigh Accelerations
Proceedings of the XXth Conference of Open Innovations Association FRUCT
Micromechanical accelerometer
surface acoustic waves
sensitive element
title Sensitive Element of Microaccelerometer on Surface Acoustic Waves for Measuremant of Superhigh Accelerations
title_full Sensitive Element of Microaccelerometer on Surface Acoustic Waves for Measuremant of Superhigh Accelerations
title_fullStr Sensitive Element of Microaccelerometer on Surface Acoustic Waves for Measuremant of Superhigh Accelerations
title_full_unstemmed Sensitive Element of Microaccelerometer on Surface Acoustic Waves for Measuremant of Superhigh Accelerations
title_short Sensitive Element of Microaccelerometer on Surface Acoustic Waves for Measuremant of Superhigh Accelerations
title_sort sensitive element of microaccelerometer on surface acoustic waves for measuremant of superhigh accelerations
topic Micromechanical accelerometer
surface acoustic waves
sensitive element
url https://fruct.org/publications/abstract23/files/She.pdf
work_keys_str_mv AT sergeishevchenko sensitiveelementofmicroaccelerometeronsurfaceacousticwavesformeasuremantofsuperhighaccelerations
AT mariyakhivrich sensitiveelementofmicroaccelerometeronsurfaceacousticwavesformeasuremantofsuperhighaccelerations
AT alexanderkukaev sensitiveelementofmicroaccelerometeronsurfaceacousticwavesformeasuremantofsuperhighaccelerations