Low-temperature metal/Zerodur heterogeneous bonding through gas-phase processed adhesion promoting interfacial layers
The bonding of ceramic to metal has been challenging due to the dissimilar nature of the materials, particularly different surface properties and the coefficients of thermal expansion (CTE). To address the issues, gas phase-processed thin metal films were inserted at the metal/ceramic interface to m...
Main Authors: | Katherine N. Klokkevold, Weston Keeven, Dong Hun Lee, Michael Clevenger, Mingyuan Liu, Kwangsoo No, Han Wook Song, Sunghwan Lee |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2022-10-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/6.0002114 |
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