Rapid evaluation of particle properties using inverse SEM simulations
The characteristic X-rays produced by the interactions of the electron beam with the sample in a scanning electron microscope (SEM) are usually captured with a variable-energy detector, a process termed energy dispersive spectrometry (EDS). The purpose of this work is to exploit inverse simulations...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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EDP Sciences
2017-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://doi.org/10.1051/epjconf/201715306013 |
| _version_ | 1818923751177191424 |
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| author | Bekar Kursat B. Miller Thomas M. Patton Bruce W. Weber Charles F. |
| author_facet | Bekar Kursat B. Miller Thomas M. Patton Bruce W. Weber Charles F. |
| author_sort | Bekar Kursat B. |
| collection | DOAJ |
| description | The characteristic X-rays produced by the interactions of the electron beam with the sample in a scanning electron microscope (SEM) are usually captured with a variable-energy detector, a process termed energy dispersive spectrometry (EDS). The purpose of this work is to exploit inverse simulations of SEM-EDS spectra to enable rapid determination of sample properties, particularly elemental composition. This is accomplished using penORNL, a modified version of PENELOPE, and a modified version of the traditional Levenberg–Marquardt nonlinear optimization algorithm, which together is referred to as MOZAIK-SEM. The overall conclusion of this work is that MOZAIK-SEM is a promising method for performing inverse analysis of X-ray spectra generated within a SEM. As this methodology exists now, MOZAIK-SEM has been shown to calculate the elemental composition of an unknown sample within a few percent of the actual composition. |
| first_indexed | 2024-12-20T02:14:24Z |
| format | Article |
| id | doaj.art-dbb2c3948d1e441f952d41c7e7de309b |
| institution | Directory Open Access Journal |
| issn | 2100-014X |
| language | English |
| last_indexed | 2024-12-20T02:14:24Z |
| publishDate | 2017-01-01 |
| publisher | EDP Sciences |
| record_format | Article |
| series | EPJ Web of Conferences |
| spelling | doaj.art-dbb2c3948d1e441f952d41c7e7de309b2022-12-21T19:56:58ZengEDP SciencesEPJ Web of Conferences2100-014X2017-01-011530601310.1051/epjconf/201715306013epjconf_icrs2017_06013Rapid evaluation of particle properties using inverse SEM simulationsBekar Kursat B.0Miller Thomas M.1Patton Bruce W.2Weber Charles F.3Oak Ridge National Laboratory, Reactor and Nuclear Systems DivisionOak Ridge National Laboratory, Reactor and Nuclear Systems DivisionOak Ridge National Laboratory, Reactor and Nuclear Systems DivisionOak Ridge National Laboratory, Reactor and Nuclear Systems DivisionThe characteristic X-rays produced by the interactions of the electron beam with the sample in a scanning electron microscope (SEM) are usually captured with a variable-energy detector, a process termed energy dispersive spectrometry (EDS). The purpose of this work is to exploit inverse simulations of SEM-EDS spectra to enable rapid determination of sample properties, particularly elemental composition. This is accomplished using penORNL, a modified version of PENELOPE, and a modified version of the traditional Levenberg–Marquardt nonlinear optimization algorithm, which together is referred to as MOZAIK-SEM. The overall conclusion of this work is that MOZAIK-SEM is a promising method for performing inverse analysis of X-ray spectra generated within a SEM. As this methodology exists now, MOZAIK-SEM has been shown to calculate the elemental composition of an unknown sample within a few percent of the actual composition.https://doi.org/10.1051/epjconf/201715306013 |
| spellingShingle | Bekar Kursat B. Miller Thomas M. Patton Bruce W. Weber Charles F. Rapid evaluation of particle properties using inverse SEM simulations EPJ Web of Conferences |
| title | Rapid evaluation of particle properties using inverse SEM simulations |
| title_full | Rapid evaluation of particle properties using inverse SEM simulations |
| title_fullStr | Rapid evaluation of particle properties using inverse SEM simulations |
| title_full_unstemmed | Rapid evaluation of particle properties using inverse SEM simulations |
| title_short | Rapid evaluation of particle properties using inverse SEM simulations |
| title_sort | rapid evaluation of particle properties using inverse sem simulations |
| url | https://doi.org/10.1051/epjconf/201715306013 |
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