Morphology of macropores in n-Si formed in NH4 F-containing solutions during photoanodization

The features of pore formation during photoanodization in electrolytes based on ammonium fluoride are studied depending on illumination, pH, current density. When comparing electrolytes with different pH (acidic and alkaline), a decrease in the pore diameter is observed at the same illumination...

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Main Authors: V. V. Bolotov, I. V. Ponomareva, K. E. Ivlev
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education 2020-11-01
Series:Омский научный вестник
Subjects:
Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2020/5%20(173)/79-83%20%D0%91%D0%BE%D0%BB%D0%BE%D1%82%D0%BE%D0%B2%20%D0%92.%20%D0%92.,%20%D0%9F%D0%BE%D0%BD%D0%BE%D0%BC%D0%B0%D1%80%D0%B5%D0%B2%D0%B0%20%D0%98.%20%D0%92.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95..pdf
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author V. V. Bolotov
I. V. Ponomareva
K. E. Ivlev
author_facet V. V. Bolotov
I. V. Ponomareva
K. E. Ivlev
author_sort V. V. Bolotov
collection DOAJ
description The features of pore formation during photoanodization in electrolytes based on ammonium fluoride are studied depending on illumination, pH, current density. When comparing electrolytes with different pH (acidic and alkaline), a decrease in the pore diameter is observed at the same illumination and current densities in alkaline HF: NH4 OH solutions at a relatively equal etching rate in depth. In dilute HF: NH4 OH: H2 O under low illumination, there is a direct dissolution of silicon with the formation of a «starlike» pore morphology and a branching tendency. In the case of a concentrated solution of HF: NH4 OH 1: 4 branching is observed with increasing current density.
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spelling doaj.art-dc16323aba064d12a2d377f2d0a505c22025-02-02T18:29:02ZengOmsk State Technical University, Federal State Autonoumos Educational Institution of Higher EducationОмский научный вестник1813-82252541-75412020-11-015 (173)798310.25206/1813-8225-2020-173-79-83Morphology of macropores in n-Si formed in NH4 F-containing solutions during photoanodizationV. V. Bolotov0I. V. Ponomareva1K. E. Ivlev2Omsk Scientific Center of Siberian Branch of Russian Academy of SciencesOmsk Scientific Center of Siberian Branch of Russian Academy of SciencesOmsk Scientific Center of Siberian Branch of Russian Academy of SciencesThe features of pore formation during photoanodization in electrolytes based on ammonium fluoride are studied depending on illumination, pH, current density. When comparing electrolytes with different pH (acidic and alkaline), a decrease in the pore diameter is observed at the same illumination and current densities in alkaline HF: NH4 OH solutions at a relatively equal etching rate in depth. In dilute HF: NH4 OH: H2 O under low illumination, there is a direct dissolution of silicon with the formation of a «starlike» pore morphology and a branching tendency. In the case of a concentrated solution of HF: NH4 OH 1: 4 branching is observed with increasing current density.https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2020/5%20(173)/79-83%20%D0%91%D0%BE%D0%BB%D0%BE%D1%82%D0%BE%D0%B2%20%D0%92.%20%D0%92.,%20%D0%9F%D0%BE%D0%BD%D0%BE%D0%BC%D0%B0%D1%80%D0%B5%D0%B2%D0%B0%20%D0%98.%20%D0%92.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95..pdfmacroporous siliconphotoanodizationelectron microscopy
spellingShingle V. V. Bolotov
I. V. Ponomareva
K. E. Ivlev
Morphology of macropores in n-Si formed in NH4 F-containing solutions during photoanodization
Омский научный вестник
macroporous silicon
photoanodization
electron microscopy
title Morphology of macropores in n-Si formed in NH4 F-containing solutions during photoanodization
title_full Morphology of macropores in n-Si formed in NH4 F-containing solutions during photoanodization
title_fullStr Morphology of macropores in n-Si formed in NH4 F-containing solutions during photoanodization
title_full_unstemmed Morphology of macropores in n-Si formed in NH4 F-containing solutions during photoanodization
title_short Morphology of macropores in n-Si formed in NH4 F-containing solutions during photoanodization
title_sort morphology of macropores in n si formed in nh4 f containing solutions during photoanodization
topic macroporous silicon
photoanodization
electron microscopy
url https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2020/5%20(173)/79-83%20%D0%91%D0%BE%D0%BB%D0%BE%D1%82%D0%BE%D0%B2%20%D0%92.%20%D0%92.,%20%D0%9F%D0%BE%D0%BD%D0%BE%D0%BC%D0%B0%D1%80%D0%B5%D0%B2%D0%B0%20%D0%98.%20%D0%92.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95..pdf
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