Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands
<p>Abstract</p> <p>A lithography-free method for fabricating the nanogrids and quasi-beehive nanostructures on Si substrates is developed. It combines sequential treatments of thermal annealing with reactive ion etching (RIE) on SiGe thin films grown on (100)-Si substrates. The SiG...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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SpringerOpen
2010-01-01
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| Series: | Nanoscale Research Letters |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/s11671-010-9661-7 |
| _version_ | 1827884277357871104 |
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| author | Juang Jenh-Yih Chang Yuan-Ming Jian Sheng-Rui |
| author_facet | Juang Jenh-Yih Chang Yuan-Ming Jian Sheng-Rui |
| author_sort | Juang Jenh-Yih |
| collection | DOAJ |
| description | <p>Abstract</p> <p>A lithography-free method for fabricating the nanogrids and quasi-beehive nanostructures on Si substrates is developed. It combines sequential treatments of thermal annealing with reactive ion etching (RIE) on SiGe thin films grown on (100)-Si substrates. The SiGe thin films deposited by ultrahigh vacuum chemical vapor deposition form self-assembled nanoislands via the strain-induced surface roughening (Asaro-Tiller-Grinfeld instability) during thermal annealing, which, in turn, serve as patterned sacrifice regions for subsequent RIE process carried out for fabricating nanogrids and beehive-like nanostructures on Si substrates. The scanning electron microscopy and atomic force microscopy observations confirmed that the resultant pattern of the obtained structures can be manipulated by tuning the treatment conditions, suggesting an interesting alternative route of producing self-organized nanostructures.</p> |
| first_indexed | 2024-03-12T19:26:08Z |
| format | Article |
| id | doaj.art-dc7726944cc446b8a87ed6bf31c60b3e |
| institution | Directory Open Access Journal |
| issn | 1931-7573 1556-276X |
| language | English |
| last_indexed | 2024-03-12T19:26:08Z |
| publishDate | 2010-01-01 |
| publisher | SpringerOpen |
| record_format | Article |
| series | Nanoscale Research Letters |
| spelling | doaj.art-dc7726944cc446b8a87ed6bf31c60b3e2023-08-02T04:51:44ZengSpringerOpenNanoscale Research Letters1931-75731556-276X2010-01-015914561463Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe IslandsJuang Jenh-YihChang Yuan-MingJian Sheng-Rui<p>Abstract</p> <p>A lithography-free method for fabricating the nanogrids and quasi-beehive nanostructures on Si substrates is developed. It combines sequential treatments of thermal annealing with reactive ion etching (RIE) on SiGe thin films grown on (100)-Si substrates. The SiGe thin films deposited by ultrahigh vacuum chemical vapor deposition form self-assembled nanoislands via the strain-induced surface roughening (Asaro-Tiller-Grinfeld instability) during thermal annealing, which, in turn, serve as patterned sacrifice regions for subsequent RIE process carried out for fabricating nanogrids and beehive-like nanostructures on Si substrates. The scanning electron microscopy and atomic force microscopy observations confirmed that the resultant pattern of the obtained structures can be manipulated by tuning the treatment conditions, suggesting an interesting alternative route of producing self-organized nanostructures.</p>http://dx.doi.org/10.1007/s11671-010-9661-7SiGeHigh-resolution reciprocal space mappingSEMAFMTEM |
| spellingShingle | Juang Jenh-Yih Chang Yuan-Ming Jian Sheng-Rui Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands Nanoscale Research Letters SiGe High-resolution reciprocal space mapping SEM AFM TEM |
| title | Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands |
| title_full | Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands |
| title_fullStr | Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands |
| title_full_unstemmed | Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands |
| title_short | Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands |
| title_sort | nanogrids and beehive like nanostructures formed by plasma etching the self organized sige islands |
| topic | SiGe High-resolution reciprocal space mapping SEM AFM TEM |
| url | http://dx.doi.org/10.1007/s11671-010-9661-7 |
| work_keys_str_mv | AT juangjenhyih nanogridsandbeehivelikenanostructuresformedbyplasmaetchingtheselforganizedsigeislands AT changyuanming nanogridsandbeehivelikenanostructuresformedbyplasmaetchingtheselforganizedsigeislands AT jianshengrui nanogridsandbeehivelikenanostructuresformedbyplasmaetchingtheselforganizedsigeislands |