Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands

Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands

<p>Abstract</p> <p>A lithography-free method for fabricating the nanogrids and quasi-beehive nanostructures on Si substrates is developed. It combines sequential treatments of thermal annealing with reactive ion etching (RIE) on SiGe thin films grown on (100)-Si substrates. The SiG...

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Bibliographic Details
Main Authors: Juang Jenh-Yih, Chang Yuan-Ming, Jian Sheng-Rui
Format: Article
Language:English
Published: SpringerOpen 2010-01-01
Series:Nanoscale Research Letters
Subjects:
SiGe
High-resolution reciprocal space mapping
SEM
AFM
TEM
Online Access:http://dx.doi.org/10.1007/s11671-010-9661-7

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