Tunable Encapsulation and Doping of Monolayer MoS2 by In Situ Probing of Excitonic Properties During Atomic Layer Deposition

Tunable Encapsulation and Doping of Monolayer MoS2 by In Situ Probing of Excitonic Properties During Atomic Layer Deposition

Abstract Here, it is shown that in situ spectroscopic ellipsometry (SE) is a powerful method for probing the effects of reactant adsorption and film formation on the excitonic properties of 2D materials during atomic layer deposition (ALD), thus allowing optimization of both film growth and opto(ele...

पूर्ण विवरण

ग्रंथसूची विवरण
मुख्य लेखकों: Alex Henning, Sergej Levashov, Chenjiang Qian, Theresa Grünleitner, Julian Primbs, Jonathan J. Finley, Ian D. Sharp
स्वरूप: लेख
भाषा:English
प्रकाशित: Wiley-VCH 2023-05-01
श्रृंखला:Advanced Materials Interfaces
विषय:
2D materials integration
2D materials protection
atomic layer deposition
in situ ellipsometry
monolayer MoS 2
ultrathin aluminum oxide
ऑनलाइन पहुंच:https://doi.org/10.1002/admi.202202429

इंटरनेट

https://doi.org/10.1002/admi.202202429

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