A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes
Frequency trimming based on mass and stiffness modification is an important post-fabrication process for micro-shell resonators (MSRs). However, the trimming effects on the quality factor are seldom studied, although they may have great influence on the performance of the resonator. This paper prese...
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| Format: | Article |
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MDPI AG
2019-10-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/10/10/695 |
| _version_ | 1811269343621677056 |
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| author | Kun Lu Xiang Xi Dingbang Xiao Yan Shi Ming Zhuo Xuezhong Wu Yulie Wu |
| author_facet | Kun Lu Xiang Xi Dingbang Xiao Yan Shi Ming Zhuo Xuezhong Wu Yulie Wu |
| author_sort | Kun Lu |
| collection | DOAJ |
| description | Frequency trimming based on mass and stiffness modification is an important post-fabrication process for micro-shell resonators (MSRs). However, the trimming effects on the quality factor are seldom studied, although they may have great influence on the performance of the resonator. This paper presents a study on the quality factor (Q-factor) variation of trimmed micro-shell resonators (MSR). Thermoelastic damping (<i>Q</i><sub>TED</sub>) and anchor loss (<i>Q</i><sub>anchor</sub>) are found to be the dominant energy loss mechanisms resulting in the reduction of the overall Q-factor, according to finite element method (FEM). The effects of different trimming methods on <i>Q</i><sub>TED</sub> and <i>Q</i><sub>anchor</sub> are studied here, respectively. It is found that trimming grooves ablated in the rim of the resonator can cause a ~1−10% reduction of <i>Q</i><sub>TED</sub>, and the length of trimming groove is positively related to the reduction of <i>Q</i><sub>TED</sub>. The reduction of <i>Q</i><sub>TED</sub> caused by the mass adding process is mainly related to the thermal expansion coefficient and density of the additive and contact area between the resonator and additive masses. Besides, the first and second harmonic errors caused by asymmetrical trimming can cause a 10−90% reduction of <i>Q</i><sub>anchor</sub>. Finally, trimming experiments were conducted on different resonators and the results were compared with FEM simulation. The work presented in this paper could help to optimize the trimming process of MSRs. |
| first_indexed | 2024-04-12T21:40:25Z |
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| id | doaj.art-dcdba100329d4135a94d0fe770a5a94e |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-04-12T21:40:25Z |
| publishDate | 2019-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-dcdba100329d4135a94d0fe770a5a94e2022-12-22T03:15:47ZengMDPI AGMicromachines2072-666X2019-10-01101069510.3390/mi10100695mi10100695A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass ModesKun Lu0Xiang Xi1Dingbang Xiao2Yan Shi3Ming Zhuo4Xuezhong Wu5Yulie Wu6College of Intelligence Science, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science, National University of Defense Technology, Changsha 410073, ChinaFrequency trimming based on mass and stiffness modification is an important post-fabrication process for micro-shell resonators (MSRs). However, the trimming effects on the quality factor are seldom studied, although they may have great influence on the performance of the resonator. This paper presents a study on the quality factor (Q-factor) variation of trimmed micro-shell resonators (MSR). Thermoelastic damping (<i>Q</i><sub>TED</sub>) and anchor loss (<i>Q</i><sub>anchor</sub>) are found to be the dominant energy loss mechanisms resulting in the reduction of the overall Q-factor, according to finite element method (FEM). The effects of different trimming methods on <i>Q</i><sub>TED</sub> and <i>Q</i><sub>anchor</sub> are studied here, respectively. It is found that trimming grooves ablated in the rim of the resonator can cause a ~1−10% reduction of <i>Q</i><sub>TED</sub>, and the length of trimming groove is positively related to the reduction of <i>Q</i><sub>TED</sub>. The reduction of <i>Q</i><sub>TED</sub> caused by the mass adding process is mainly related to the thermal expansion coefficient and density of the additive and contact area between the resonator and additive masses. Besides, the first and second harmonic errors caused by asymmetrical trimming can cause a 10−90% reduction of <i>Q</i><sub>anchor</sub>. Finally, trimming experiments were conducted on different resonators and the results were compared with FEM simulation. The work presented in this paper could help to optimize the trimming process of MSRs.https://www.mdpi.com/2072-666X/10/10/695micro-shell resonatorquality factormechanical trimmingfinite element method (fem) simulation |
| spellingShingle | Kun Lu Xiang Xi Dingbang Xiao Yan Shi Ming Zhuo Xuezhong Wu Yulie Wu A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes Micromachines micro-shell resonator quality factor mechanical trimming finite element method (fem) simulation |
| title | A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes |
| title_full | A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes |
| title_fullStr | A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes |
| title_full_unstemmed | A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes |
| title_short | A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes |
| title_sort | study on the trimming effects on the quality factor of micro shell resonators vibrating in wineglass modes |
| topic | micro-shell resonator quality factor mechanical trimming finite element method (fem) simulation |
| url | https://www.mdpi.com/2072-666X/10/10/695 |
| work_keys_str_mv | AT kunlu astudyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT xiangxi astudyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT dingbangxiao astudyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT yanshi astudyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT mingzhuo astudyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT xuezhongwu astudyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT yuliewu astudyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT kunlu studyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT xiangxi studyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT dingbangxiao studyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT yanshi studyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT mingzhuo studyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT xuezhongwu studyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes AT yuliewu studyonthetrimmingeffectsonthequalityfactorofmicroshellresonatorsvibratinginwineglassmodes |