Synthesis and Characterization of Indium-Doped SnO<sub>2</sub>-Based Impedance Spectroscopy Sensor for Real-Time Humidity Sensing Applications

Metallic transition-metal dichalcogenides are emerging as promising electrode materials for applications such as 2D electronic devices owing to their good electrical conductivity. In this study, a high-performance humidity sensor based on NbTe<sub>2</sub> electrode material and an indium...

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Main Authors: Birhanu Alemayehu, Eunsung Shin, Vladimir Vasilyev, Guru Subramanyam
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Crystals
Subjects:
Online Access:https://www.mdpi.com/2073-4352/14/1/82
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author Birhanu Alemayehu
Eunsung Shin
Vladimir Vasilyev
Guru Subramanyam
author_facet Birhanu Alemayehu
Eunsung Shin
Vladimir Vasilyev
Guru Subramanyam
author_sort Birhanu Alemayehu
collection DOAJ
description Metallic transition-metal dichalcogenides are emerging as promising electrode materials for applications such as 2D electronic devices owing to their good electrical conductivity. In this study, a high-performance humidity sensor based on NbTe<sub>2</sub> electrode material and an indium-doped SnO<sub>2</sub> thin film sensing layer was fabricated using a pulsed laser deposition system. The morphology, structural, elemental compositions, and electrical properties of the as-deposited samples were characterized. Additionally, the humidity sensing response of the fabricated sensor with In-doped SnO<sub>2</sub> (8:92 wt%) sensing film was evaluated in a wide range of relative humidity at room temperature. The results demonstrated that the humidity sensor based on In-doped SnO<sub>2</sub> exhibited a high sensitivity of 103.1 Ω/%RH, fast response and recovery times, a low hysteresis value, good linearity, and repeatability. In addition, the sensor had good long-term stability, with a variation in impedance of less than 3%. The results indicated that the humidity sensor could be suitable for practical humidity sensing applications.
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spelling doaj.art-dd20e5ce0ecb4650abd2ee54a06279ba2024-01-29T13:51:29ZengMDPI AGCrystals2073-43522024-01-011418210.3390/cryst14010082Synthesis and Characterization of Indium-Doped SnO<sub>2</sub>-Based Impedance Spectroscopy Sensor for Real-Time Humidity Sensing ApplicationsBirhanu Alemayehu0Eunsung Shin1Vladimir Vasilyev2Guru Subramanyam3Center of Excellence for Thin-Film Research and Surface Engineering, Department of Electrical and Computer Engineering, University of Dayton, Dayton, OH 45469, USACenter of Excellence for Thin-Film Research and Surface Engineering, Department of Electrical and Computer Engineering, University of Dayton, Dayton, OH 45469, USAAir Force Research Laboratory, Sensors Directorate, Wright Patterson AFB, Fairborn, OH 45433, USACenter of Excellence for Thin-Film Research and Surface Engineering, Department of Electrical and Computer Engineering, University of Dayton, Dayton, OH 45469, USAMetallic transition-metal dichalcogenides are emerging as promising electrode materials for applications such as 2D electronic devices owing to their good electrical conductivity. In this study, a high-performance humidity sensor based on NbTe<sub>2</sub> electrode material and an indium-doped SnO<sub>2</sub> thin film sensing layer was fabricated using a pulsed laser deposition system. The morphology, structural, elemental compositions, and electrical properties of the as-deposited samples were characterized. Additionally, the humidity sensing response of the fabricated sensor with In-doped SnO<sub>2</sub> (8:92 wt%) sensing film was evaluated in a wide range of relative humidity at room temperature. The results demonstrated that the humidity sensor based on In-doped SnO<sub>2</sub> exhibited a high sensitivity of 103.1 Ω/%RH, fast response and recovery times, a low hysteresis value, good linearity, and repeatability. In addition, the sensor had good long-term stability, with a variation in impedance of less than 3%. The results indicated that the humidity sensor could be suitable for practical humidity sensing applications.https://www.mdpi.com/2073-4352/14/1/82humidity sensorIn-doped SnO<sub>2</sub>pulsed laser depositioninter-digitated transducerNbTe<sub>2</sub> electrode
spellingShingle Birhanu Alemayehu
Eunsung Shin
Vladimir Vasilyev
Guru Subramanyam
Synthesis and Characterization of Indium-Doped SnO<sub>2</sub>-Based Impedance Spectroscopy Sensor for Real-Time Humidity Sensing Applications
Crystals
humidity sensor
In-doped SnO<sub>2</sub>
pulsed laser deposition
inter-digitated transducer
NbTe<sub>2</sub> electrode
title Synthesis and Characterization of Indium-Doped SnO<sub>2</sub>-Based Impedance Spectroscopy Sensor for Real-Time Humidity Sensing Applications
title_full Synthesis and Characterization of Indium-Doped SnO<sub>2</sub>-Based Impedance Spectroscopy Sensor for Real-Time Humidity Sensing Applications
title_fullStr Synthesis and Characterization of Indium-Doped SnO<sub>2</sub>-Based Impedance Spectroscopy Sensor for Real-Time Humidity Sensing Applications
title_full_unstemmed Synthesis and Characterization of Indium-Doped SnO<sub>2</sub>-Based Impedance Spectroscopy Sensor for Real-Time Humidity Sensing Applications
title_short Synthesis and Characterization of Indium-Doped SnO<sub>2</sub>-Based Impedance Spectroscopy Sensor for Real-Time Humidity Sensing Applications
title_sort synthesis and characterization of indium doped sno sub 2 sub based impedance spectroscopy sensor for real time humidity sensing applications
topic humidity sensor
In-doped SnO<sub>2</sub>
pulsed laser deposition
inter-digitated transducer
NbTe<sub>2</sub> electrode
url https://www.mdpi.com/2073-4352/14/1/82
work_keys_str_mv AT birhanualemayehu synthesisandcharacterizationofindiumdopedsnosub2subbasedimpedancespectroscopysensorforrealtimehumiditysensingapplications
AT eunsungshin synthesisandcharacterizationofindiumdopedsnosub2subbasedimpedancespectroscopysensorforrealtimehumiditysensingapplications
AT vladimirvasilyev synthesisandcharacterizationofindiumdopedsnosub2subbasedimpedancespectroscopysensorforrealtimehumiditysensingapplications
AT gurusubramanyam synthesisandcharacterizationofindiumdopedsnosub2subbasedimpedancespectroscopysensorforrealtimehumiditysensingapplications