Diamagnetically levitated nanopositioners with large-range and multiple degrees of freedom
Precision positioning stages are often central to science and technology at the micrometer and nanometer length scales. Here, the authors report compact, diamagnetically levitated positioning stages that achieve large-range, six degrees-of-freedom positioning with nanometer-scale precision.
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2022-06-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-022-31046-4 |