DISCHARGE CHARACTERISTICS OF THE MAGNETRON SYSTEM FOR SPUTTERING, DEPOSITION, AND NANOTECHNOLOGY APPLICATIONS
Magnetron sputtering is known for years as a powerful tool for coating deposition of cutting tools and machine parts. However the experimental measurements of the magnetron discharge parameters are still necessary to provide a consumer of the magnetron system with the reliable characteristics. A vol...
| Auteurs principaux: | , , , |
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| Format: | Article |
| Langue: | English |
| Publié: |
National Aerospace University «Kharkiv Aviation Institute»
2020-11-01
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| Collection: | Авіаційно-космічна техніка та технологія |
| Sujets: | |
| Accès en ligne: | http://nti.khai.edu/ojs/index.php/aktt/article/view/1285 |