Design and Analysis of a New High Precision Decoupled XY Compact Parallel Micromanipulator
With the development of nanotechnology that contains automatic control, precision machinery and precise measurement, etc., micro/nano manipulation has become a new research direction in recent years. This paper presents the design and analysis procedures of a new high precision XY decoupled compact...
Main Authors: | Xigang Chen, Yangmin Li |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-03-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/8/3/82 |
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