Electron beam focusing in the magnetic field of a bent electron beam evaporator
In this paper, the vacuum film deposition through electron beam evaporation has been reviewed and the effect of magnetic field on the operation of this system has been explained. Then, the magnetic field distribution due to magnetic components configuartion of a commercial evaporation source with 27...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Isfahan University of Technology
2017-08-01
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| Series: | Iranian Journal of Physics Research |
| Subjects: | |
| Online Access: | http://ijpr.iut.ac.ir/browse.php?a_code=A-10-1-824&slc_lang=en&sid=1 |