Optimized Integrated PIN Photodiodes with Improved Backend Layers
This paper constitutes a systematic analysis of the impact of low- doped intrinsic base material, different bottom anti-reflective coatings and dielectric filter deposition on the electrical and optical performance of Si photodiodes processed in standard CMOS fabrication processes. Photodiode design...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2019-09-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/september-october_2019/Vol_237/P_3112.pdf |