Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage
A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/9/581 |
| _version_ | 1819051452830580736 |
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| author | Quan Zhang Jianguo Zhao Xin Shen Qing Xiao Jun Huang Yuan Wang |
| author_facet | Quan Zhang Jianguo Zhao Xin Shen Qing Xiao Jun Huang Yuan Wang |
| author_sort | Quan Zhang |
| collection | DOAJ |
| description | A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%. |
| first_indexed | 2024-12-21T12:04:10Z |
| format | Article |
| id | doaj.art-dea2ce08f87a464581dbffa9097ef1ca |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-21T12:04:10Z |
| publishDate | 2019-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-dea2ce08f87a464581dbffa9097ef1ca2022-12-21T19:04:44ZengMDPI AGMicromachines2072-666X2019-08-0110958110.3390/mi10090581mi10090581Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning StageQuan Zhang0Jianguo Zhao1Xin Shen2Qing Xiao3Jun Huang4Yuan Wang5School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, ChinaSchool of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, ChinaSchool of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, ChinaSchool of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, ChinaNational Research Center of Pumps, Jiangsu University, Zhenjiang 212013, ChinaCollege of Communication Engineering, Army Engineering University of PLA, Nanjing 210007, ChinaA novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%.https://www.mdpi.com/2072-666X/10/9/581compliant mechanismmicro-positioning stageCastigliano’s second theorembeam constrained modelbridge-type amplification mechanism |
| spellingShingle | Quan Zhang Jianguo Zhao Xin Shen Qing Xiao Jun Huang Yuan Wang Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage Micromachines compliant mechanism micro-positioning stage Castigliano’s second theorem beam constrained model bridge-type amplification mechanism |
| title | Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
| title_full | Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
| title_fullStr | Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
| title_full_unstemmed | Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
| title_short | Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
| title_sort | design modeling and testing of a novel xy piezo actuated compliant micro positioning stage |
| topic | compliant mechanism micro-positioning stage Castigliano’s second theorem beam constrained model bridge-type amplification mechanism |
| url | https://www.mdpi.com/2072-666X/10/9/581 |
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