A New Optical Configuration for the Surface Encoder with an Expanded <i>Z</i>-Directional Measuring Range

A New Optical Configuration for the Surface Encoder with an Expanded <i>Z</i>-Directional Measuring Range

This paper proposes a new optical configuration for a two-axis surface encoder that can measure the in-plane (<i>X</i>-axis) and out-of-plane (<i>Z</i>-axis) displacements of a positioning stage. The two-axis surface encoder is composed of a scale grating and a sensor head. A...

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Bibliographic Details
Main Authors: Yifan Hong, Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Sensors
Subjects:
surface encoder
scale grating
reference grating
Fizeau-type measurement method
<i>Z</i>-directional measuring range
Online Access:https://www.mdpi.com/1424-8220/22/8/3010

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