Evaluation of Crystalline Volume Fraction of Laser-Annealed Polysilicon Thin Films Using Raman Spectroscopy and Spectroscopic Ellipsometry

Evaluation of Crystalline Volume Fraction of Laser-Annealed Polysilicon Thin Films Using Raman Spectroscopy and Spectroscopic Ellipsometry

We investigated the crystallinities of poly silicon (poly Si) annealed via green laser annealing (GLA) with a 532-nm pulsed laser and blue laser annealing (BLA) with 450-nm continuous-wave lasers. Three-dimensional heat transfer simulations were performed to obtain the temperature distributions in a...

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Bibliographic Details
Main Authors: Jeongsang Pyo, Bohae Lee, Han-Youl Ryu
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Micromachines
Subjects:
laser anneal
crystallization
low-temperature poly silicon
Raman spectroscopy
ellipsometry
Online Access:https://www.mdpi.com/2072-666X/12/8/999

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