Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels

In order to solve the difficult problem of dressing micro-grooves on the surface of metal-bonded diamond wheel, an infrared nanosecond laser was used to carry out the dressing test. The influences of laser average power, pulse repetition frequency, laser ablation time and other factors on the materi...

Full description

Bibliographic Details
Main Authors: Xuanyang GUO, Yuchun XU, Jianfeng CAO, Jianhui ZHU, Yanjun ZHAO, Jinwei ZHAO, Chaoyu SHI
Format: Article
Language:zho
Published: Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2022-06-01
Series:Jin'gangshi yu moliao moju gongcheng
Subjects:
Online Access:http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.3006
_version_ 1797805928489156608
author Xuanyang GUO
Yuchun XU
Jianfeng CAO
Jianhui ZHU
Yanjun ZHAO
Jinwei ZHAO
Chaoyu SHI
author_facet Xuanyang GUO
Yuchun XU
Jianfeng CAO
Jianhui ZHU
Yanjun ZHAO
Jinwei ZHAO
Chaoyu SHI
author_sort Xuanyang GUO
collection DOAJ
description In order to solve the difficult problem of dressing micro-grooves on the surface of metal-bonded diamond wheel, an infrared nanosecond laser was used to carry out the dressing test. The influences of laser average power, pulse repetition frequency, laser ablation time and other factors on the material removal of metal-bonded diamond grinding wheel was investigated. A gradient step laser dressing process was proposed for U-shaped and V-shaped grinding wheel micro-grooves. The results show that the actual contour of the grinding wheel micro-groove after dressing is compared with the designed contour, the maximum absolute value of the relative error of the actual width at the top and bottom is 4.4%, and the maximum absolute value of the relative error of the actual depth is 9.6%. The edge of the sapphire wafer with a diameter of 4 inches (10.16 cm) is chamfered with the V-shaped micro-groove of the trimmed grinding wheel. The sharp edge of the wafer is trimmed into a regular shape, and the symmetry of the edge contour is good, which is consistent with the micro-groove contour of the surface of the laser trimmed grinding wheel. The feasibility of laser shaping and dressing of the micro-groove on the surface of metal-bonded diamond grinding wheel is verified.
first_indexed 2024-03-13T05:59:32Z
format Article
id doaj.art-dfb28594ef7041cba911ce08084fce9a
institution Directory Open Access Journal
issn 1006-852X
language zho
last_indexed 2024-03-13T05:59:32Z
publishDate 2022-06-01
publisher Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
record_format Article
series Jin'gangshi yu moliao moju gongcheng
spelling doaj.art-dfb28594ef7041cba911ce08084fce9a2023-06-13T01:54:00ZzhoZhengzhou Research Institute for Abrasives & Grinding Co., Ltd.Jin'gangshi yu moliao moju gongcheng1006-852X2022-06-0142336437210.13394/j.cnki.jgszz.2021.3006GUOXUANYANGLaser dressing technology for micro-grooves on the surface of metal-bonded diamond wheelsXuanyang GUO0Yuchun XU1Jianfeng CAO2Jianhui ZHU3Yanjun ZHAO4Jinwei ZHAO5Chaoyu SHI6State Key Laboratory of Superabrasives, Zhengzhou 450001, ChinaState Key Laboratory of Superabrasives, Zhengzhou 450001, ChinaZhengzhou Research Institute for Abrasives & Grinding Co., Ltd., Zhengzhou 450001, ChinaState Key Laboratory of Superabrasives, Zhengzhou 450001, ChinaState Key Laboratory of Superabrasives, Zhengzhou 450001, ChinaZhengzhou Research Institute for Abrasives & Grinding Co., Ltd., Zhengzhou 450001, ChinaState Key Laboratory of Superabrasives, Zhengzhou 450001, ChinaIn order to solve the difficult problem of dressing micro-grooves on the surface of metal-bonded diamond wheel, an infrared nanosecond laser was used to carry out the dressing test. The influences of laser average power, pulse repetition frequency, laser ablation time and other factors on the material removal of metal-bonded diamond grinding wheel was investigated. A gradient step laser dressing process was proposed for U-shaped and V-shaped grinding wheel micro-grooves. The results show that the actual contour of the grinding wheel micro-groove after dressing is compared with the designed contour, the maximum absolute value of the relative error of the actual width at the top and bottom is 4.4%, and the maximum absolute value of the relative error of the actual depth is 9.6%. The edge of the sapphire wafer with a diameter of 4 inches (10.16 cm) is chamfered with the V-shaped micro-groove of the trimmed grinding wheel. The sharp edge of the wafer is trimmed into a regular shape, and the symmetry of the edge contour is good, which is consistent with the micro-groove contour of the surface of the laser trimmed grinding wheel. The feasibility of laser shaping and dressing of the micro-groove on the surface of metal-bonded diamond grinding wheel is verified.http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.3006laser processingmetal-bonded diamond wheelmicro-groove dressingwafer edge grinding
spellingShingle Xuanyang GUO
Yuchun XU
Jianfeng CAO
Jianhui ZHU
Yanjun ZHAO
Jinwei ZHAO
Chaoyu SHI
Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels
Jin'gangshi yu moliao moju gongcheng
laser processing
metal-bonded diamond wheel
micro-groove dressing
wafer edge grinding
title Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels
title_full Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels
title_fullStr Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels
title_full_unstemmed Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels
title_short Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels
title_sort laser dressing technology for micro grooves on the surface of metal bonded diamond wheels
topic laser processing
metal-bonded diamond wheel
micro-groove dressing
wafer edge grinding
url http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.3006
work_keys_str_mv AT xuanyangguo laserdressingtechnologyformicrogroovesonthesurfaceofmetalbondeddiamondwheels
AT yuchunxu laserdressingtechnologyformicrogroovesonthesurfaceofmetalbondeddiamondwheels
AT jianfengcao laserdressingtechnologyformicrogroovesonthesurfaceofmetalbondeddiamondwheels
AT jianhuizhu laserdressingtechnologyformicrogroovesonthesurfaceofmetalbondeddiamondwheels
AT yanjunzhao laserdressingtechnologyformicrogroovesonthesurfaceofmetalbondeddiamondwheels
AT jinweizhao laserdressingtechnologyformicrogroovesonthesurfaceofmetalbondeddiamondwheels
AT chaoyushi laserdressingtechnologyformicrogroovesonthesurfaceofmetalbondeddiamondwheels