Random and Systematic Variation in Nanoscale Hf0.5Zr0.5O2 Ferroelectric FinFETs: Physical Origin and Neuromorphic Circuit Implications
This work presents 2-bits/cell operation in deeply scaled ferroelectric finFETs (Fe-finFET) with a 1 µs write pulse of maximum ±5 V amplitude and WRITE endurance above 109 cycles. Fe-finFET devices with single and multiple fins have been fabricated on an SOI wafer using a gate first process, with ga...
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Fformat: | Erthygl |
Iaith: | English |
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Frontiers Media S.A.
2022-01-01
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Cyfres: | Frontiers in Nanotechnology |
Pynciau: | |
Mynediad Ar-lein: | https://www.frontiersin.org/articles/10.3389/fnano.2021.826232/full |