Tunable superconductivity of epitaxial TiN films through oxygen doping
Titanium nitride (TiN) film is a remarkable material for a variety of applications ranging from superhard coating to superconducting quantum devices, which can be easily oxidized when it works in the atmosphere. However, the study of its oxidation effect on the crystal and electronic structures of e...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2020-05-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0008431 |
| _version_ | 1818528399637872640 |
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| author | Shaoqin Peng Ruyi Zhang Yang Song Yujuan Pei Jiachang Bi Jiagui Feng Minghua Tang Yanwei Cao |
| author_facet | Shaoqin Peng Ruyi Zhang Yang Song Yujuan Pei Jiachang Bi Jiagui Feng Minghua Tang Yanwei Cao |
| author_sort | Shaoqin Peng |
| collection | DOAJ |
| description | Titanium nitride (TiN) film is a remarkable material for a variety of applications ranging from superhard coating to superconducting quantum devices, which can be easily oxidized when it works in the atmosphere. However, the study of its oxidation effect on the crystal and electronic structures of epitaxial TiN films is rare as yet. Here, we coherently synthesize TiN epitaxial films on MgO single crystal substrates via reactive magnetron sputtering and, then, dope oxygen into these films via a controllable oxidation process. The crystal and electronic structures are characterized by high-resolution x-ray diffraction, x-ray photoelectron spectra, and Raman spectra. It is revealed that the crystal structure remains to be of the rocksalt type in these films even with heavy oxygen doping. The data of temperature-dependent electrical transport measurements indicate that the superconducting critical temperature (kinetic inductance) decreases (increases) from 4.6 K (0.672 pH/□) in the pristine TiN film to 3.4 K (1.13 pH/□) in the film with a maximum oxygen doping level. Our work provides a controllable way to tune the superconductivity of TiN films, which enables the flexibility to engineer the resultant performance of TiN-based superconducting quantum devices. |
| first_indexed | 2024-12-11T06:49:16Z |
| format | Article |
| id | doaj.art-e02ae693074946d4bf25d6aac2dc90cc |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-12-11T06:49:16Z |
| publishDate | 2020-05-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-e02ae693074946d4bf25d6aac2dc90cc2022-12-22T01:16:57ZengAIP Publishing LLCAIP Advances2158-32262020-05-01105055113055113-610.1063/5.0008431Tunable superconductivity of epitaxial TiN films through oxygen dopingShaoqin Peng0Ruyi Zhang1Yang Song2Yujuan Pei3Jiachang Bi4Jiagui Feng5Minghua Tang6Yanwei Cao7School of Materials Science and Engineering, Xiangtan University, Xiangtan, Hunan 315201, ChinaNingbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, Zhejiang 315201, ChinaNingbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, Zhejiang 315201, ChinaNingbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, Zhejiang 315201, ChinaNingbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, Zhejiang 315201, ChinaSuzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, No. 398 Ruoshui Road, SEID, Suzhou Industrial Park, Suzhou, Jiangsu 215123, People’s Republic of ChinaSchool of Materials Science and Engineering, Xiangtan University, Xiangtan, Hunan 315201, ChinaNingbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, Zhejiang 315201, ChinaTitanium nitride (TiN) film is a remarkable material for a variety of applications ranging from superhard coating to superconducting quantum devices, which can be easily oxidized when it works in the atmosphere. However, the study of its oxidation effect on the crystal and electronic structures of epitaxial TiN films is rare as yet. Here, we coherently synthesize TiN epitaxial films on MgO single crystal substrates via reactive magnetron sputtering and, then, dope oxygen into these films via a controllable oxidation process. The crystal and electronic structures are characterized by high-resolution x-ray diffraction, x-ray photoelectron spectra, and Raman spectra. It is revealed that the crystal structure remains to be of the rocksalt type in these films even with heavy oxygen doping. The data of temperature-dependent electrical transport measurements indicate that the superconducting critical temperature (kinetic inductance) decreases (increases) from 4.6 K (0.672 pH/□) in the pristine TiN film to 3.4 K (1.13 pH/□) in the film with a maximum oxygen doping level. Our work provides a controllable way to tune the superconductivity of TiN films, which enables the flexibility to engineer the resultant performance of TiN-based superconducting quantum devices.http://dx.doi.org/10.1063/5.0008431 |
| spellingShingle | Shaoqin Peng Ruyi Zhang Yang Song Yujuan Pei Jiachang Bi Jiagui Feng Minghua Tang Yanwei Cao Tunable superconductivity of epitaxial TiN films through oxygen doping AIP Advances |
| title | Tunable superconductivity of epitaxial TiN films through oxygen doping |
| title_full | Tunable superconductivity of epitaxial TiN films through oxygen doping |
| title_fullStr | Tunable superconductivity of epitaxial TiN films through oxygen doping |
| title_full_unstemmed | Tunable superconductivity of epitaxial TiN films through oxygen doping |
| title_short | Tunable superconductivity of epitaxial TiN films through oxygen doping |
| title_sort | tunable superconductivity of epitaxial tin films through oxygen doping |
| url | http://dx.doi.org/10.1063/5.0008431 |
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