Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension
A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular motion of the spinning rotor being controlled by...
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MDPI AG
2016-10-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/16/10/1747 |
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| author | Boqian Sun Shunyue Wang Haixia Li Xiaoxia He |
| author_facet | Boqian Sun Shunyue Wang Haixia Li Xiaoxia He |
| author_sort | Boqian Sun |
| collection | DOAJ |
| description | A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular motion of the spinning rotor being controlled by a torque-rebalance loop. In this paper, a decoupling compensation method is proposed and investigated experimentally based on an electrostatically suspended micromachined gyroscope. In order to eliminate the negative spring effect inherent in the gyroscope dynamics, a stiffness compensation scheme was utilized in design of the decoupled rebalance loop to ensure loop stability and increase suspension stiffness. The experimental results show an overall stiffness increase of 30.3% after compensation. A decoupling method comprised of inner- and outer-loop decoupling compensators is proposed to minimize the cross-axis coupling error. The inner-loop decoupling compensator aims to attenuate the angular position coupling. The experimental frequency response shows a position coupling attenuation by 14.36 dB at 1 Hz. Moreover, the cross-axis coupling between the two angular rate output signals can be attenuated theoretically from −56.2 dB down to −102 dB by further appending the outer-loop decoupling compensator. The proposed dual-loop decoupling compensation algorithm could be applied to other dual-axis spinning-rotor gyroscopes with various suspension solutions. |
| first_indexed | 2024-04-14T06:58:34Z |
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| id | doaj.art-e03ef86c1cc2499a82cc91887eba636e |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-14T06:58:34Z |
| publishDate | 2016-10-01 |
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| spelling | doaj.art-e03ef86c1cc2499a82cc91887eba636e2022-12-22T02:06:49ZengMDPI AGSensors1424-82202016-10-011610174710.3390/s16101747s16101747Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic SuspensionBoqian Sun0Shunyue Wang1Haixia Li2Xiaoxia He3Department of Precision Instrument, Tsinghua University, Beijing 100084, ChinaDepartment of Precision Instrument, Tsinghua University, Beijing 100084, ChinaDepartment of Precision Instrument, Tsinghua University, Beijing 100084, ChinaDepartment of Precision Instrument, Tsinghua University, Beijing 100084, ChinaA micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular motion of the spinning rotor being controlled by a torque-rebalance loop. In this paper, a decoupling compensation method is proposed and investigated experimentally based on an electrostatically suspended micromachined gyroscope. In order to eliminate the negative spring effect inherent in the gyroscope dynamics, a stiffness compensation scheme was utilized in design of the decoupled rebalance loop to ensure loop stability and increase suspension stiffness. The experimental results show an overall stiffness increase of 30.3% after compensation. A decoupling method comprised of inner- and outer-loop decoupling compensators is proposed to minimize the cross-axis coupling error. The inner-loop decoupling compensator aims to attenuate the angular position coupling. The experimental frequency response shows a position coupling attenuation by 14.36 dB at 1 Hz. Moreover, the cross-axis coupling between the two angular rate output signals can be attenuated theoretically from −56.2 dB down to −102 dB by further appending the outer-loop decoupling compensator. The proposed dual-loop decoupling compensation algorithm could be applied to other dual-axis spinning-rotor gyroscopes with various suspension solutions.http://www.mdpi.com/1424-8220/16/10/1747decoupling controlgyroscope rebalance loopstiffness compensationinner-loop decoupling compensatorouter-loop decoupling compensatormicromachined spinning-rotor gyroscopeelectrostatic suspension |
| spellingShingle | Boqian Sun Shunyue Wang Haixia Li Xiaoxia He Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension Sensors decoupling control gyroscope rebalance loop stiffness compensation inner-loop decoupling compensator outer-loop decoupling compensator micromachined spinning-rotor gyroscope electrostatic suspension |
| title | Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension |
| title_full | Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension |
| title_fullStr | Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension |
| title_full_unstemmed | Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension |
| title_short | Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension |
| title_sort | decoupling control of micromachined spinning rotor gyroscope with electrostatic suspension |
| topic | decoupling control gyroscope rebalance loop stiffness compensation inner-loop decoupling compensator outer-loop decoupling compensator micromachined spinning-rotor gyroscope electrostatic suspension |
| url | http://www.mdpi.com/1424-8220/16/10/1747 |
| work_keys_str_mv | AT boqiansun decouplingcontrolofmicromachinedspinningrotorgyroscopewithelectrostaticsuspension AT shunyuewang decouplingcontrolofmicromachinedspinningrotorgyroscopewithelectrostaticsuspension AT haixiali decouplingcontrolofmicromachinedspinningrotorgyroscopewithelectrostaticsuspension AT xiaoxiahe decouplingcontrolofmicromachinedspinningrotorgyroscopewithelectrostaticsuspension |