Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications
Abstract This work presents the single-chip integration of a multi-frequency surface acoustic wave resonator (SAWR) based humidity sensor. Graphene oxide (GO), a humidity-sensing material, is integrated onto a confined sensing area of SAWR via electrospray deposition (ESD). The ESD method allows ng-...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2023-04-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-023-34099-7 |
| _version_ | 1797836512980631552 |
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| author | Soon In Jung Il Ryu Jang Chaehyun Ryu Jeonhyeong Park Aneeta Manjari Padhan Hoe Joon Kim |
| author_facet | Soon In Jung Il Ryu Jang Chaehyun Ryu Jeonhyeong Park Aneeta Manjari Padhan Hoe Joon Kim |
| author_sort | Soon In Jung |
| collection | DOAJ |
| description | Abstract This work presents the single-chip integration of a multi-frequency surface acoustic wave resonator (SAWR) based humidity sensor. Graphene oxide (GO), a humidity-sensing material, is integrated onto a confined sensing area of SAWR via electrospray deposition (ESD). The ESD method allows ng-resolution deposition of GO, optimizing the amount of sensing material. The proposed sensor consists of SWARs at three different resonant frequencies (180, 200 and 250 MHz) with a shared common sensing region, thus allowing direct analysis of sensor performances at different operating frequencies. Our findings reveal that the resonant frequency of the sensor impacts both measurement sensitivity and stability. A higher operating frequency ensures better sensitivity but suffers from a larger damping effect from absorbed water molecules. The maximum measurement sensitivity of 17.4 ppm/RH% is achieved with low drift. In addition, the developed sensor exhibits improved stability and sensitivity by as much as 150% and 75% in frequency shift and Quality factor (Q), respectively, by carefully selecting the operating frequencies at a given RH% range. Finally, the sensors are used for various hygienic applications, such as non-contact proximity detection and face mask inspection. |
| first_indexed | 2024-04-09T15:11:11Z |
| format | Article |
| id | doaj.art-e069aced11b241f1ab55b7f118622964 |
| institution | Directory Open Access Journal |
| issn | 2045-2322 |
| language | English |
| last_indexed | 2024-04-09T15:11:11Z |
| publishDate | 2023-04-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Scientific Reports |
| spelling | doaj.art-e069aced11b241f1ab55b7f1186229642023-04-30T11:14:38ZengNature PortfolioScientific Reports2045-23222023-04-0113111110.1038/s41598-023-34099-7Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applicationsSoon In Jung0Il Ryu Jang1Chaehyun Ryu2Jeonhyeong Park3Aneeta Manjari Padhan4Hoe Joon Kim5Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST)Abstract This work presents the single-chip integration of a multi-frequency surface acoustic wave resonator (SAWR) based humidity sensor. Graphene oxide (GO), a humidity-sensing material, is integrated onto a confined sensing area of SAWR via electrospray deposition (ESD). The ESD method allows ng-resolution deposition of GO, optimizing the amount of sensing material. The proposed sensor consists of SWARs at three different resonant frequencies (180, 200 and 250 MHz) with a shared common sensing region, thus allowing direct analysis of sensor performances at different operating frequencies. Our findings reveal that the resonant frequency of the sensor impacts both measurement sensitivity and stability. A higher operating frequency ensures better sensitivity but suffers from a larger damping effect from absorbed water molecules. The maximum measurement sensitivity of 17.4 ppm/RH% is achieved with low drift. In addition, the developed sensor exhibits improved stability and sensitivity by as much as 150% and 75% in frequency shift and Quality factor (Q), respectively, by carefully selecting the operating frequencies at a given RH% range. Finally, the sensors are used for various hygienic applications, such as non-contact proximity detection and face mask inspection.https://doi.org/10.1038/s41598-023-34099-7 |
| spellingShingle | Soon In Jung Il Ryu Jang Chaehyun Ryu Jeonhyeong Park Aneeta Manjari Padhan Hoe Joon Kim Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications Scientific Reports |
| title | Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications |
| title_full | Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications |
| title_fullStr | Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications |
| title_full_unstemmed | Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications |
| title_short | Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications |
| title_sort | graphene oxide decorated multi frequency surface acoustic wave humidity sensor for hygienic applications |
| url | https://doi.org/10.1038/s41598-023-34099-7 |
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