| Summary: | The flexure hinge is a kind of micro-displacement adjustment device with application prospects because of its high displacement resolution, positioning accuracy and repeatability. In this study, a micro-displacement worktable with four degrees of freedom (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula>, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula>, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula>, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula>) was designed. The micro-displacement worktable was composed of three different flexure hinges. The adjustment ranges and adjustment accuracy of flexure hinges in terms of their respective degrees were improved. The micro-displacement worktable performance was examined by FEA (Finite Element Method). The maximum displacement that was adjusted in <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula> and <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula> was 1.67 µm and 1.74 µm. The maximum angle adjusted in the <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula> and <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula> direction was 14.90° and 18.58°. A test platform was developed for micro-displacement worktable performance tests. The simulation results showed a good agreement with the experimental results.
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