Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges
The flexure hinge is a kind of micro-displacement adjustment device with application prospects because of its high displacement resolution, positioning accuracy and repeatability. In this study, a micro-displacement worktable with four degrees of freedom (<inline-formula><math xmlns="h...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-03-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/4/518 |
| _version_ | 1797410054770524160 |
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| author | Lan Yan Anna Jiang Feng Jiang Guangda Liu Fuzeng Wang Xian Wu |
| author_facet | Lan Yan Anna Jiang Feng Jiang Guangda Liu Fuzeng Wang Xian Wu |
| author_sort | Lan Yan |
| collection | DOAJ |
| description | The flexure hinge is a kind of micro-displacement adjustment device with application prospects because of its high displacement resolution, positioning accuracy and repeatability. In this study, a micro-displacement worktable with four degrees of freedom (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula>, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula>, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula>, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula>) was designed. The micro-displacement worktable was composed of three different flexure hinges. The adjustment ranges and adjustment accuracy of flexure hinges in terms of their respective degrees were improved. The micro-displacement worktable performance was examined by FEA (Finite Element Method). The maximum displacement that was adjusted in <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula> and <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula> was 1.67 µm and 1.74 µm. The maximum angle adjusted in the <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula> and <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula> direction was 14.90° and 18.58°. A test platform was developed for micro-displacement worktable performance tests. The simulation results showed a good agreement with the experimental results. |
| first_indexed | 2024-03-09T04:24:20Z |
| format | Article |
| id | doaj.art-e0b85025eb3c491a84245ee6386d8017 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T04:24:20Z |
| publishDate | 2022-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-e0b85025eb3c491a84245ee6386d80172023-12-03T13:43:39ZengMDPI AGMicromachines2072-666X2022-03-0113451810.3390/mi13040518Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure HingesLan Yan0Anna Jiang1Feng Jiang2Guangda Liu3Fuzeng Wang4Xian Wu5College of Mechanical Engineering and Automation, National Huaqiao University, Xiamen 361021, ChinaCollege of Mechanical Engineering and Automation, National Huaqiao University, Xiamen 361021, ChinaInstitute of Manufacturing Engineering, National Huaqiao University, Xiamen 361021, ChinaXiamen Xiazhi Technology Tool Co., Ltd., Xiamen 361006, ChinaInstitute of Manufacturing Engineering, National Huaqiao University, Xiamen 361021, ChinaCollege of Mechanical Engineering and Automation, National Huaqiao University, Xiamen 361021, ChinaThe flexure hinge is a kind of micro-displacement adjustment device with application prospects because of its high displacement resolution, positioning accuracy and repeatability. In this study, a micro-displacement worktable with four degrees of freedom (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula>, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula>, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula>, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula>) was designed. The micro-displacement worktable was composed of three different flexure hinges. The adjustment ranges and adjustment accuracy of flexure hinges in terms of their respective degrees were improved. The micro-displacement worktable performance was examined by FEA (Finite Element Method). The maximum displacement that was adjusted in <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula> and <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">→</mo></mrow></mover></semantics></math></inline-formula> was 1.67 µm and 1.74 µm. The maximum angle adjusted in the <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">X</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula> and <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mover><mi mathvariant="normal">Z</mi><mrow><mo stretchy="false">︵</mo></mrow></mover></semantics></math></inline-formula> direction was 14.90° and 18.58°. A test platform was developed for micro-displacement worktable performance tests. The simulation results showed a good agreement with the experimental results.https://www.mdpi.com/2072-666X/13/4/518flexure hingemicro-displacementfour degrees of freedomfinite element simulation |
| spellingShingle | Lan Yan Anna Jiang Feng Jiang Guangda Liu Fuzeng Wang Xian Wu Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges Micromachines flexure hinge micro-displacement four degrees of freedom finite element simulation |
| title | Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges |
| title_full | Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges |
| title_fullStr | Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges |
| title_full_unstemmed | Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges |
| title_short | Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges |
| title_sort | design and performance analysis of a micro displacement worktable based on flexure hinges |
| topic | flexure hinge micro-displacement four degrees of freedom finite element simulation |
| url | https://www.mdpi.com/2072-666X/13/4/518 |
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