Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range

Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range

Impact is the most important factor affecting the reliability of Micro-Electro-Mechanical System (MEMS) gyroscopes, therefore corresponding reliability design is very essential. This paper proposes a shock-protected structure (SPS) capable of withstanding a full temperature range from −40 °C to 80 °...

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Bibliographic Details
Main Authors: Yingyu Xu, Jing Lin, Chunhua He, Heng Wu, Qinwen Huang, Guizhen Yan
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Micromachines
Subjects:
MEMS gyroscope
shock models
reliability design
thermal reliability
Online Access:https://www.mdpi.com/2072-666X/15/2/206

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