Exploring the Influence of Material Properties of Epoxy Molding Compound on Wafer Warpage in Fan-Out Wafer-Level Packaging

This study investigated the impact of material properties of epoxy molding compounds on wafer warpage in fan-out wafer-level packaging. As there is currently a lack of comprehensive discussion on the various material property parameters of EMC materials, it is essential to identify the critical infl...

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Main Authors: Wan-Chun Chuang, Yi Huang, Po-En Chen
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/16/9/3482
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author Wan-Chun Chuang
Yi Huang
Po-En Chen
author_facet Wan-Chun Chuang
Yi Huang
Po-En Chen
author_sort Wan-Chun Chuang
collection DOAJ
description This study investigated the impact of material properties of epoxy molding compounds on wafer warpage in fan-out wafer-level packaging. As there is currently a lack of comprehensive discussion on the various material property parameters of EMC materials, it is essential to identify the critical influencing factors and quantify the effects of each parameter on wafer warpage. The material properties include Young’s modulus of the epoxy molding compound before and after the glass transition temperature (Tg) range of 25–35 °C (E<sub>L</sub>) and 235–260 °C (E<sub>H</sub>), coefficient of thermal expansion (α1, α2), and the temperature change (∆T) between E<sub>L</sub> and E<sub>H</sub>. Results show that, within the range of extreme values of material properties, E<sub>L</sub> and α1 are the critical factors that affect wafer warpage during the decarrier process in fan-out packaging. α1 has a more significant impact on wafer warpage compared with E<sub>L</sub>. E<sub>H</sub>, α2, Tg, and ∆T have little influence on wafer warpage. Additionally, the study identified the optimized material property of the epoxy molding compound that can reduce the maximum wafer warpage in the X and Y directions from initial values of 7.34 mm and 7.189 mm to 0.545 mm and 0.45 mm, respectively, resulting in a reduction of wafer warpage of 92.58% (X direction) and 93.74% (Y direction). Thus, this study proposes an approach for evaluating the impact of material properties of epoxy molding compounds on wafer warpage in fan-out wafer-level packaging. The approach aims to address the issue of excessive wafer warpage due to material variation and to provide criteria for selecting appropriate epoxy molding compounds to enhance process yield in packaging production lines.
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spelling doaj.art-e17ea64e90ee42ff87287e2a4d9e99302023-11-17T23:16:42ZengMDPI AGMaterials1996-19442023-04-01169348210.3390/ma16093482Exploring the Influence of Material Properties of Epoxy Molding Compound on Wafer Warpage in Fan-Out Wafer-Level PackagingWan-Chun Chuang0Yi Huang1Po-En Chen2Department of Mechanical and Electromechanical Engineering, Engineering Technology Research & Promotion Center, National Sun Yat-sen University, Kaohsiung 804, TaiwanDepartment of Mechanical and Electromechanical Engineering, Engineering Technology Research & Promotion Center, National Sun Yat-sen University, Kaohsiung 804, TaiwanDepartment of Mechanical and Electromechanical Engineering, Engineering Technology Research & Promotion Center, National Sun Yat-sen University, Kaohsiung 804, TaiwanThis study investigated the impact of material properties of epoxy molding compounds on wafer warpage in fan-out wafer-level packaging. As there is currently a lack of comprehensive discussion on the various material property parameters of EMC materials, it is essential to identify the critical influencing factors and quantify the effects of each parameter on wafer warpage. The material properties include Young’s modulus of the epoxy molding compound before and after the glass transition temperature (Tg) range of 25–35 °C (E<sub>L</sub>) and 235–260 °C (E<sub>H</sub>), coefficient of thermal expansion (α1, α2), and the temperature change (∆T) between E<sub>L</sub> and E<sub>H</sub>. Results show that, within the range of extreme values of material properties, E<sub>L</sub> and α1 are the critical factors that affect wafer warpage during the decarrier process in fan-out packaging. α1 has a more significant impact on wafer warpage compared with E<sub>L</sub>. E<sub>H</sub>, α2, Tg, and ∆T have little influence on wafer warpage. Additionally, the study identified the optimized material property of the epoxy molding compound that can reduce the maximum wafer warpage in the X and Y directions from initial values of 7.34 mm and 7.189 mm to 0.545 mm and 0.45 mm, respectively, resulting in a reduction of wafer warpage of 92.58% (X direction) and 93.74% (Y direction). Thus, this study proposes an approach for evaluating the impact of material properties of epoxy molding compounds on wafer warpage in fan-out wafer-level packaging. The approach aims to address the issue of excessive wafer warpage due to material variation and to provide criteria for selecting appropriate epoxy molding compounds to enhance process yield in packaging production lines.https://www.mdpi.com/1996-1944/16/9/3482fan-out wafer-level packagingwarpageepoxy molding compoundfinite element analysis
spellingShingle Wan-Chun Chuang
Yi Huang
Po-En Chen
Exploring the Influence of Material Properties of Epoxy Molding Compound on Wafer Warpage in Fan-Out Wafer-Level Packaging
Materials
fan-out wafer-level packaging
warpage
epoxy molding compound
finite element analysis
title Exploring the Influence of Material Properties of Epoxy Molding Compound on Wafer Warpage in Fan-Out Wafer-Level Packaging
title_full Exploring the Influence of Material Properties of Epoxy Molding Compound on Wafer Warpage in Fan-Out Wafer-Level Packaging
title_fullStr Exploring the Influence of Material Properties of Epoxy Molding Compound on Wafer Warpage in Fan-Out Wafer-Level Packaging
title_full_unstemmed Exploring the Influence of Material Properties of Epoxy Molding Compound on Wafer Warpage in Fan-Out Wafer-Level Packaging
title_short Exploring the Influence of Material Properties of Epoxy Molding Compound on Wafer Warpage in Fan-Out Wafer-Level Packaging
title_sort exploring the influence of material properties of epoxy molding compound on wafer warpage in fan out wafer level packaging
topic fan-out wafer-level packaging
warpage
epoxy molding compound
finite element analysis
url https://www.mdpi.com/1996-1944/16/9/3482
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