Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity
Directional couplers, as power splitters, have provided a significant contribution for light splitting and combining in silicon photonics. However, the splitting ratio of conventional directional couplers is very sensitive to wavelength, which limits the bandwidth and the transmission performance of...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-03-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/4/559 |
| _version_ | 1797410055211974656 |
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| author | Donghao Li Bin Li Bo Tang Peng Zhang Yan Yang Ruonan Liu Ling Xie Zhihua Li |
| author_facet | Donghao Li Bin Li Bo Tang Peng Zhang Yan Yang Ruonan Liu Ling Xie Zhihua Li |
| author_sort | Donghao Li |
| collection | DOAJ |
| description | Directional couplers, as power splitters, have provided a significant contribution for light splitting and combining in silicon photonics. However, the splitting ratio of conventional directional couplers is very sensitive to wavelength, which limits the bandwidth and the transmission performance of the devices. In this work, a silicon nitride bent directional coupler with large bandwidth, large fabrication tolerance, and low thermal sensitivity is proposed and demonstrated through simulation analysis and experiments. Moreover, the fabrication process of 400 nm thick silicon nitride photonic devices is described, which are compatible with complementary metal–oxide–semiconductor technology. The 1 dB bandwidth of the bent waveguide coupler can reach 80 nm, and the thermal sensitivity is reduced by 85% compared to the silicon-based devices. |
| first_indexed | 2024-03-09T04:23:21Z |
| format | Article |
| id | doaj.art-e1d00d1a51f84efb84ea87a9f2113427 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T04:23:21Z |
| publishDate | 2022-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-e1d00d1a51f84efb84ea87a9f21134272023-12-03T13:43:59ZengMDPI AGMicromachines2072-666X2022-03-0113455910.3390/mi13040559Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal SensitivityDonghao Li0Bin Li1Bo Tang2Peng Zhang3Yan Yang4Ruonan Liu5Ling Xie6Zhihua Li7Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaDirectional couplers, as power splitters, have provided a significant contribution for light splitting and combining in silicon photonics. However, the splitting ratio of conventional directional couplers is very sensitive to wavelength, which limits the bandwidth and the transmission performance of the devices. In this work, a silicon nitride bent directional coupler with large bandwidth, large fabrication tolerance, and low thermal sensitivity is proposed and demonstrated through simulation analysis and experiments. Moreover, the fabrication process of 400 nm thick silicon nitride photonic devices is described, which are compatible with complementary metal–oxide–semiconductor technology. The 1 dB bandwidth of the bent waveguide coupler can reach 80 nm, and the thermal sensitivity is reduced by 85% compared to the silicon-based devices.https://www.mdpi.com/2072-666X/13/4/559directional couplerssilicon nitridesilicon photonicsbent waveguides |
| spellingShingle | Donghao Li Bin Li Bo Tang Peng Zhang Yan Yang Ruonan Liu Ling Xie Zhihua Li Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity Micromachines directional couplers silicon nitride silicon photonics bent waveguides |
| title | Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
| title_full | Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
| title_fullStr | Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
| title_full_unstemmed | Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
| title_short | Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
| title_sort | broadband silicon nitride power splitter based on bent directional couplers with low thermal sensitivity |
| topic | directional couplers silicon nitride silicon photonics bent waveguides |
| url | https://www.mdpi.com/2072-666X/13/4/559 |
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