Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution
Tetramethyl ammonium hydroxide (TMAH) is an anisotropic etchant used in the wet etching process of the semiconductor industry and is hard to degrade by biotreatments when it exists in wastewater. This study evaluated the performance of a system combined with ultraviolet, magnetic catalyst (SiO2/Fe3O...
| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | English |
| Publicado: |
Hindawi Limited
2013-01-01
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| Series: | International Journal of Photoenergy |
| Acceso en liña: | http://dx.doi.org/10.1155/2013/191742 |