Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence

The movable super-diffraction optical needle (MSON) is a tightly focused beam like a “needle”, which can realize vector scanning on the focusing plane. Not only does it have a long focal depth, but its resolution also exceeds the diffraction limit. The modulation and control technology required for...

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Main Authors: Simo Wang, Siyang Yu, Fanxing Li, Fuping Peng, Jialin Du, Bo Qi, Lifang Shi, Wei Yan
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/10/15/5237
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author Simo Wang
Siyang Yu
Fanxing Li
Fuping Peng
Jialin Du
Bo Qi
Lifang Shi
Wei Yan
author_facet Simo Wang
Siyang Yu
Fanxing Li
Fuping Peng
Jialin Du
Bo Qi
Lifang Shi
Wei Yan
author_sort Simo Wang
collection DOAJ
description The movable super-diffraction optical needle (MSON) is a tightly focused beam like a “needle”, which can realize vector scanning on the focusing plane. Not only does it have a long focal depth, but its resolution also exceeds the diffraction limit. The modulation and control technology required for generating MSON by oblique incidence is explored in this manuscript for the purpose of processing high-aspect-ratio, sub-wavelength structures. As the optical needle generated by traditional methods is static and sensitive to variation of the angle information of the incident beam, here we introduce a confocal scanning system by using a two-dimensional galvanometer system, a scan lens, and a tube lens to control the oblique incidence angle. The effects of the oblique incidence angle on the resolution, depth of focus, uniformity, and side lobes of the MSON were analyzed. Further, the voltage-controlled liquid crystal located between the scan lens and the 2D galvanometer system can be used to compensate for the additional phase difference caused by oblique incidence. The aspect ratio is defined as the ratio of depth of focus to resolution. By modulating and controlling the light field, the MSON with high aspect ratio (7.36), sub-diffractive beam size (0.42<i>λ</i>), and long depth of focus (3.09<i>λ</i>) has been obtained with homogeneous intensity, and suppressed side lobes. High speed, high axial positioning tolerance, and high-resolution laser processing can also be achieved, which removes the restrictions presented by traditional laser processing technology, for which high resolution and long depth of focus cannot be achieved simultaneously.
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spelling doaj.art-e21bc72e34694e65922b5792083ebd6b2023-11-20T08:24:43ZengMDPI AGApplied Sciences2076-34172020-07-011015523710.3390/app10155237Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique IncidenceSimo Wang0Siyang Yu1Fanxing Li2Fuping Peng3Jialin Du4Bo Qi5Lifang Shi6Wei Yan7Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaThe movable super-diffraction optical needle (MSON) is a tightly focused beam like a “needle”, which can realize vector scanning on the focusing plane. Not only does it have a long focal depth, but its resolution also exceeds the diffraction limit. The modulation and control technology required for generating MSON by oblique incidence is explored in this manuscript for the purpose of processing high-aspect-ratio, sub-wavelength structures. As the optical needle generated by traditional methods is static and sensitive to variation of the angle information of the incident beam, here we introduce a confocal scanning system by using a two-dimensional galvanometer system, a scan lens, and a tube lens to control the oblique incidence angle. The effects of the oblique incidence angle on the resolution, depth of focus, uniformity, and side lobes of the MSON were analyzed. Further, the voltage-controlled liquid crystal located between the scan lens and the 2D galvanometer system can be used to compensate for the additional phase difference caused by oblique incidence. The aspect ratio is defined as the ratio of depth of focus to resolution. By modulating and controlling the light field, the MSON with high aspect ratio (7.36), sub-diffractive beam size (0.42<i>λ</i>), and long depth of focus (3.09<i>λ</i>) has been obtained with homogeneous intensity, and suppressed side lobes. High speed, high axial positioning tolerance, and high-resolution laser processing can also be achieved, which removes the restrictions presented by traditional laser processing technology, for which high resolution and long depth of focus cannot be achieved simultaneously.https://www.mdpi.com/2076-3417/10/15/5237optical needleresolutiondepth of focushigh aspect ratiomovable
spellingShingle Simo Wang
Siyang Yu
Fanxing Li
Fuping Peng
Jialin Du
Bo Qi
Lifang Shi
Wei Yan
Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence
Applied Sciences
optical needle
resolution
depth of focus
high aspect ratio
movable
title Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence
title_full Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence
title_fullStr Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence
title_full_unstemmed Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence
title_short Modulation and Control Technology for Generating Movable Super-Diffraction Optical Needle by Oblique Incidence
title_sort modulation and control technology for generating movable super diffraction optical needle by oblique incidence
topic optical needle
resolution
depth of focus
high aspect ratio
movable
url https://www.mdpi.com/2076-3417/10/15/5237
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