Studi Spektroskopi Electron Spin Resonance (Esr) Lapisan Tipis Amorf Silikon Karbon (A-Sic:H) Hasil Deposisi Metode Dc Sputtering
The dangling bond defect density in sputtered amorphous silicon carbon alloys have been studied by electron spin resonance (ESR). The results show that the spin density decreased slightly with increasing methane fl ow rate (CH4). The infl uence of carbon and hydrogen incorporation on g-value reveale...
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| Format: | Article |
| Language: | English |
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Universitas Indonesia
2002-04-01
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| Series: | Makara Seri Sains |
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| Online Access: | http://journal.ui.ac.id/science/article/view/100/96 |