Development of Piezoelectrically Driven Quasi-Static 2D MEMS Mirrors with Extremely Large FoV for Scanning LiDARs

Development of Piezoelectrically Driven Quasi-Static 2D MEMS Mirrors with Extremely Large FoV for Scanning LiDARs

In this paper, a piezoelectrically driven quasi-static MEMS mirror is developed for a scanning LiDAR system. Finite element method (FEM) simulations are used to optimize the design of the MEMS scanner. With special emphasis on the shape and thickness of the actuators, they are optimized to reach a m...

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Bibliographic Details
Main Authors: Paul Raschdorf, Jeong-Yeon Hwang, Lena Wysocki, Lianzhi Wen, Jörg Albers, Gunnar Wille, Erdem Yarar, Shanshan Gu-Stoppel
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Proceedings
Subjects:
MEMS
MEMS mirror
design optimization
silicon technology
optics
Online Access:https://www.mdpi.com/2504-3900/97/1/124

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https://www.mdpi.com/2504-3900/97/1/124

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