The Change of Electronic Transport Behaviors by P and B Doping in Nano-Crystalline Silicon Films with Very High Conductivities

Nano-crystalline Si films with high conductivities are highly desired in order to develop the new generation of nano-devices. Here, we first demonstrate that the grain boundaries played an important role in the carrier transport process in un-doped nano-crystalline Si films as revealed by the temper...

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Main Authors: Dan Shan, Mingqing Qian, Yang Ji, Xiaofan Jiang, Jun Xu, Kunji Chen
Format: Article
Language:English
Published: MDPI AG 2016-12-01
Series:Nanomaterials
Subjects:
Online Access:http://www.mdpi.com/2079-4991/6/12/233
_version_ 1818174519220633600
author Dan Shan
Mingqing Qian
Yang Ji
Xiaofan Jiang
Jun Xu
Kunji Chen
author_facet Dan Shan
Mingqing Qian
Yang Ji
Xiaofan Jiang
Jun Xu
Kunji Chen
author_sort Dan Shan
collection DOAJ
description Nano-crystalline Si films with high conductivities are highly desired in order to develop the new generation of nano-devices. Here, we first demonstrate that the grain boundaries played an important role in the carrier transport process in un-doped nano-crystalline Si films as revealed by the temperature-dependent Hall measurements. The potential barrier height can be well estimated from the experimental results, which is in good agreement with the proposed model. Then, by introducing P and B doping, it is found that the scattering of grain boundaries can be significantly suppressed and the Hall mobility is monotonously decreased with the temperature both in P- and B-doped nano-crystalline Si films, which can be attributed to the trapping of P and B dopants in the grain boundary regions to reduce the barriers. Consequently, a room temperature conductivity as high as 1.58 × 103 S/cm and 4 × 102 S/cm is achieved for the P-doped and B-doped samples, respectively.
first_indexed 2024-12-11T19:45:41Z
format Article
id doaj.art-e2f0274d033d403d9460be82946e2497
institution Directory Open Access Journal
issn 2079-4991
language English
last_indexed 2024-12-11T19:45:41Z
publishDate 2016-12-01
publisher MDPI AG
record_format Article
series Nanomaterials
spelling doaj.art-e2f0274d033d403d9460be82946e24972022-12-22T00:52:55ZengMDPI AGNanomaterials2079-49912016-12-0161223310.3390/nano6120233nano6120233The Change of Electronic Transport Behaviors by P and B Doping in Nano-Crystalline Silicon Films with Very High ConductivitiesDan Shan0Mingqing Qian1Yang Ji2Xiaofan Jiang3Jun Xu4Kunji Chen5National Laboratory of Solid State Microstructures and School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, ChinaNational Laboratory of Solid State Microstructures and School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, ChinaNational Laboratory of Solid State Microstructures and School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, ChinaNational Laboratory of Solid State Microstructures and School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, ChinaNational Laboratory of Solid State Microstructures and School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, ChinaNational Laboratory of Solid State Microstructures and School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, ChinaNano-crystalline Si films with high conductivities are highly desired in order to develop the new generation of nano-devices. Here, we first demonstrate that the grain boundaries played an important role in the carrier transport process in un-doped nano-crystalline Si films as revealed by the temperature-dependent Hall measurements. The potential barrier height can be well estimated from the experimental results, which is in good agreement with the proposed model. Then, by introducing P and B doping, it is found that the scattering of grain boundaries can be significantly suppressed and the Hall mobility is monotonously decreased with the temperature both in P- and B-doped nano-crystalline Si films, which can be attributed to the trapping of P and B dopants in the grain boundary regions to reduce the barriers. Consequently, a room temperature conductivity as high as 1.58 × 103 S/cm and 4 × 102 S/cm is achieved for the P-doped and B-doped samples, respectively.http://www.mdpi.com/2079-4991/6/12/233carrier transportdopedtemperature-dependent Hall measurement
spellingShingle Dan Shan
Mingqing Qian
Yang Ji
Xiaofan Jiang
Jun Xu
Kunji Chen
The Change of Electronic Transport Behaviors by P and B Doping in Nano-Crystalline Silicon Films with Very High Conductivities
Nanomaterials
carrier transport
doped
temperature-dependent Hall measurement
title The Change of Electronic Transport Behaviors by P and B Doping in Nano-Crystalline Silicon Films with Very High Conductivities
title_full The Change of Electronic Transport Behaviors by P and B Doping in Nano-Crystalline Silicon Films with Very High Conductivities
title_fullStr The Change of Electronic Transport Behaviors by P and B Doping in Nano-Crystalline Silicon Films with Very High Conductivities
title_full_unstemmed The Change of Electronic Transport Behaviors by P and B Doping in Nano-Crystalline Silicon Films with Very High Conductivities
title_short The Change of Electronic Transport Behaviors by P and B Doping in Nano-Crystalline Silicon Films with Very High Conductivities
title_sort change of electronic transport behaviors by p and b doping in nano crystalline silicon films with very high conductivities
topic carrier transport
doped
temperature-dependent Hall measurement
url http://www.mdpi.com/2079-4991/6/12/233
work_keys_str_mv AT danshan thechangeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT mingqingqian thechangeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT yangji thechangeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT xiaofanjiang thechangeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT junxu thechangeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT kunjichen thechangeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT danshan changeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT mingqingqian changeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT yangji changeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT xiaofanjiang changeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT junxu changeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities
AT kunjichen changeofelectronictransportbehaviorsbypandbdopinginnanocrystallinesiliconfilmswithveryhighconductivities