Experimental Observation and Simulation Model for Transient Characteristics of Negative-Capacitance in Ferroelectric HfZrO<sub>2</sub> Capacitor

We have experimentally observed the negative-capacitance transient effect in a ferroelectric HfZrO<sub>2</sub> (FE-HZO) capacitor and developed an equivalent circuit model based on the Landau- Khalatnikov (LK) theory. By considering multiple domains (MD) and domain interaction, an MD-LK...

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Main Authors: Kyungmin Jang, Nozomu Ueyama, Masaharu Kobayashi, Toshiro Hiramoto
Format: Article
Language:English
Published: IEEE 2018-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8301014/
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author Kyungmin Jang
Nozomu Ueyama
Masaharu Kobayashi
Toshiro Hiramoto
author_facet Kyungmin Jang
Nozomu Ueyama
Masaharu Kobayashi
Toshiro Hiramoto
author_sort Kyungmin Jang
collection DOAJ
description We have experimentally observed the negative-capacitance transient effect in a ferroelectric HfZrO<sub>2</sub> (FE-HZO) capacitor and developed an equivalent circuit model based on the Landau- Khalatnikov (LK) theory. By considering multiple domains (MD) and domain interaction, an MD-LK model precisely reproduced the experimental dynamic characteristics in an FE-HZO capacitor with the various input voltage amplitude and external resistance. The MD-LK model was successfully validated as a dynamic model for FE-HZO capacitor. The MD-LK model is highly expected as a useful simulation model for the dynamic NCFET with a multi-domain FE-HZO gate insulator.
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spelling doaj.art-e317f94e04b34792957db3b868ce53b72022-12-21T23:27:27ZengIEEEIEEE Journal of the Electron Devices Society2168-67342018-01-01634635310.1109/JEDS.2018.28069208301014Experimental Observation and Simulation Model for Transient Characteristics of Negative-Capacitance in Ferroelectric HfZrO<sub>2</sub> CapacitorKyungmin Jang0https://orcid.org/0000-0003-3381-4046Nozomu Ueyama1Masaharu Kobayashi2https://orcid.org/0000-0002-7945-6136Toshiro Hiramoto3https://orcid.org/0000-0001-9469-2631Institute of Industrial Science, University of Tokyo, Tokyo, JapanInstitute of Industrial Science, University of Tokyo, Tokyo, JapanInstitute of Industrial Science, University of Tokyo, Tokyo, JapanInstitute of Industrial Science, University of Tokyo, Tokyo, JapanWe have experimentally observed the negative-capacitance transient effect in a ferroelectric HfZrO<sub>2</sub> (FE-HZO) capacitor and developed an equivalent circuit model based on the Landau- Khalatnikov (LK) theory. By considering multiple domains (MD) and domain interaction, an MD-LK model precisely reproduced the experimental dynamic characteristics in an FE-HZO capacitor with the various input voltage amplitude and external resistance. The MD-LK model was successfully validated as a dynamic model for FE-HZO capacitor. The MD-LK model is highly expected as a useful simulation model for the dynamic NCFET with a multi-domain FE-HZO gate insulator.https://ieeexplore.ieee.org/document/8301014/Ferroelectrichafnium-zirconium oxidenegative-capacitanceLandau-Khalatnikov theorymultiple domain
spellingShingle Kyungmin Jang
Nozomu Ueyama
Masaharu Kobayashi
Toshiro Hiramoto
Experimental Observation and Simulation Model for Transient Characteristics of Negative-Capacitance in Ferroelectric HfZrO<sub>2</sub> Capacitor
IEEE Journal of the Electron Devices Society
Ferroelectric
hafnium-zirconium oxide
negative-capacitance
Landau-Khalatnikov theory
multiple domain
title Experimental Observation and Simulation Model for Transient Characteristics of Negative-Capacitance in Ferroelectric HfZrO<sub>2</sub> Capacitor
title_full Experimental Observation and Simulation Model for Transient Characteristics of Negative-Capacitance in Ferroelectric HfZrO<sub>2</sub> Capacitor
title_fullStr Experimental Observation and Simulation Model for Transient Characteristics of Negative-Capacitance in Ferroelectric HfZrO<sub>2</sub> Capacitor
title_full_unstemmed Experimental Observation and Simulation Model for Transient Characteristics of Negative-Capacitance in Ferroelectric HfZrO<sub>2</sub> Capacitor
title_short Experimental Observation and Simulation Model for Transient Characteristics of Negative-Capacitance in Ferroelectric HfZrO<sub>2</sub> Capacitor
title_sort experimental observation and simulation model for transient characteristics of negative capacitance in ferroelectric hfzro sub 2 sub capacitor
topic Ferroelectric
hafnium-zirconium oxide
negative-capacitance
Landau-Khalatnikov theory
multiple domain
url https://ieeexplore.ieee.org/document/8301014/
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AT nozomuueyama experimentalobservationandsimulationmodelfortransientcharacteristicsofnegativecapacitanceinferroelectrichfzrosub2subcapacitor
AT masaharukobayashi experimentalobservationandsimulationmodelfortransientcharacteristicsofnegativecapacitanceinferroelectrichfzrosub2subcapacitor
AT toshirohiramoto experimentalobservationandsimulationmodelfortransientcharacteristicsofnegativecapacitanceinferroelectrichfzrosub2subcapacitor