Choice of the Miniature Inertial Optomechanical Sensor Geometric Parameters with the Help of Their Mechanical Characteristics Modelling

In this paper, the mechanical characteristics of a miniature optomechanical accelerometer, similar to those proposed for a wide range of applications, have been investigated. With the help of numerical modelling, characteristics such as eigenfrequencies, quality factor, displacement magnitude, norma...

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Bibliographic Details
Main Authors: Lee Kumanchik, Marina Rezinkina, Claus Braxmaier
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/10/1865