Choice of the Miniature Inertial Optomechanical Sensor Geometric Parameters with the Help of Their Mechanical Characteristics Modelling
In this paper, the mechanical characteristics of a miniature optomechanical accelerometer, similar to those proposed for a wide range of applications, have been investigated. With the help of numerical modelling, characteristics such as eigenfrequencies, quality factor, displacement magnitude, norma...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-09-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/10/1865 |