Silicon single-photon avalanche diodes with nano-structured light trapping

The performance of silicon single-photon avalanche detectors is currently limited by the trade-off between photon detection efficiency and timing jitter. Here, the authors demonstrate how a CMOS-compatible, nanostructured, thin junction structure can make use of tailored light trapping to break this...

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Main Authors: Kai Zang, Xiao Jiang, Yijie Huo, Xun Ding, Matthew Morea, Xiaochi Chen, Ching-Ying Lu, Jian Ma, Ming Zhou, Zhenyang Xia, Zongfu Yu, Theodore I. Kamins, Qiang Zhang, James S. Harris
Format: Article
Language:English
Published: Nature Portfolio 2017-09-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-017-00733-y
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author Kai Zang
Xiao Jiang
Yijie Huo
Xun Ding
Matthew Morea
Xiaochi Chen
Ching-Ying Lu
Jian Ma
Ming Zhou
Zhenyang Xia
Zongfu Yu
Theodore I. Kamins
Qiang Zhang
James S. Harris
author_facet Kai Zang
Xiao Jiang
Yijie Huo
Xun Ding
Matthew Morea
Xiaochi Chen
Ching-Ying Lu
Jian Ma
Ming Zhou
Zhenyang Xia
Zongfu Yu
Theodore I. Kamins
Qiang Zhang
James S. Harris
author_sort Kai Zang
collection DOAJ
description The performance of silicon single-photon avalanche detectors is currently limited by the trade-off between photon detection efficiency and timing jitter. Here, the authors demonstrate how a CMOS-compatible, nanostructured, thin junction structure can make use of tailored light trapping to break this trade-off.
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spelling doaj.art-e365e9eca5ed4f7fb94afb3c499b599b2022-12-21T19:33:15ZengNature PortfolioNature Communications2041-17232017-09-01811610.1038/s41467-017-00733-ySilicon single-photon avalanche diodes with nano-structured light trappingKai Zang0Xiao Jiang1Yijie Huo2Xun Ding3Matthew Morea4Xiaochi Chen5Ching-Ying Lu6Jian Ma7Ming Zhou8Zhenyang Xia9Zongfu Yu10Theodore I. Kamins11Qiang Zhang12James S. Harris13Department of Electrical Engineering, Stanford UniversityHefei National Laboratory for Physical Sciences at the Microscale and Department of Modern Physics, University of Science and Technology of ChinaDepartment of Electrical Engineering, Stanford UniversityHefei National Laboratory for Physical Sciences at the Microscale and Department of Modern Physics, University of Science and Technology of ChinaDepartment of Electrical Engineering, Stanford UniversityDepartment of Electrical Engineering, Stanford UniversityDepartment of Electrical Engineering, Stanford UniversityHefei National Laboratory for Physical Sciences at the Microscale and Department of Modern Physics, University of Science and Technology of ChinaDepartment of Electrical and Computer Engineering, University of Wisconsin-MadisonDepartment of Electrical and Computer Engineering, University of Wisconsin-MadisonDepartment of Electrical and Computer Engineering, University of Wisconsin-MadisonDepartment of Electrical Engineering, Stanford UniversityHefei National Laboratory for Physical Sciences at the Microscale and Department of Modern Physics, University of Science and Technology of ChinaDepartment of Electrical Engineering, Stanford UniversityThe performance of silicon single-photon avalanche detectors is currently limited by the trade-off between photon detection efficiency and timing jitter. Here, the authors demonstrate how a CMOS-compatible, nanostructured, thin junction structure can make use of tailored light trapping to break this trade-off.https://doi.org/10.1038/s41467-017-00733-y
spellingShingle Kai Zang
Xiao Jiang
Yijie Huo
Xun Ding
Matthew Morea
Xiaochi Chen
Ching-Ying Lu
Jian Ma
Ming Zhou
Zhenyang Xia
Zongfu Yu
Theodore I. Kamins
Qiang Zhang
James S. Harris
Silicon single-photon avalanche diodes with nano-structured light trapping
Nature Communications
title Silicon single-photon avalanche diodes with nano-structured light trapping
title_full Silicon single-photon avalanche diodes with nano-structured light trapping
title_fullStr Silicon single-photon avalanche diodes with nano-structured light trapping
title_full_unstemmed Silicon single-photon avalanche diodes with nano-structured light trapping
title_short Silicon single-photon avalanche diodes with nano-structured light trapping
title_sort silicon single photon avalanche diodes with nano structured light trapping
url https://doi.org/10.1038/s41467-017-00733-y
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