Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table
The flow disturbance to a pneumatic vibration isolation table causes periodic fluctuation of the table. In current study, one cycle of flow disturbance is estimated offline using a disturbance observer. The time series data of one cycle estimated disturbance is then stored in the memory of digital s...
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Format: | Article |
Language: | English |
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The Japan Society of Mechanical Engineers
2013-07-01
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Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
Subjects: | |
Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/7/4/7_498/_pdf/-char/en |
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author | Habiburahman SHIRANI Yukinori NAKAMURA Shinji WAKUI |
author_facet | Habiburahman SHIRANI Yukinori NAKAMURA Shinji WAKUI |
author_sort | Habiburahman SHIRANI |
collection | DOAJ |
description | The flow disturbance to a pneumatic vibration isolation table causes periodic fluctuation of the table. In current study, one cycle of flow disturbance is estimated offline using a disturbance observer. The time series data of one cycle estimated disturbance is then stored in the memory of digital signal processor. The program codes are prepared which can detect every cycle of the flow disturbance based on the threshold of table position. The estimated signal is then repeatedly injected from the memory through a compensator to the servo valve to suppress table fluctuation due to periodic actual flow disturbance. The effectiveness of this method is demonstrated by experimental results. |
first_indexed | 2024-12-11T02:05:52Z |
format | Article |
id | doaj.art-e369f010907d41278c58c2636795d390 |
institution | Directory Open Access Journal |
issn | 1881-3054 |
language | English |
last_indexed | 2024-12-11T02:05:52Z |
publishDate | 2013-07-01 |
publisher | The Japan Society of Mechanical Engineers |
record_format | Article |
series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
spelling | doaj.art-e369f010907d41278c58c2636795d3902022-12-22T01:24:23ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542013-07-017449850510.1299/jamdsm.7.498jamdsmFlow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation TableHabiburahman SHIRANI0Yukinori NAKAMURA1Shinji WAKUI2Department of Electronic and Information Engineering, Tokyo University of Agriculture and TechnologyDepartment of Electronic and Information Engineering, Tokyo University of Agriculture and TechnologyDepartment of Electronic and Information Engineering, Tokyo University of Agriculture and TechnologyThe flow disturbance to a pneumatic vibration isolation table causes periodic fluctuation of the table. In current study, one cycle of flow disturbance is estimated offline using a disturbance observer. The time series data of one cycle estimated disturbance is then stored in the memory of digital signal processor. The program codes are prepared which can detect every cycle of the flow disturbance based on the threshold of table position. The estimated signal is then repeatedly injected from the memory through a compensator to the servo valve to suppress table fluctuation due to periodic actual flow disturbance. The effectiveness of this method is demonstrated by experimental results.https://www.jstage.jst.go.jp/article/jamdsm/7/4/7_498/_pdf/-char/enpneumatic isolation tablesupplied airflow disturbanceestimated disturbance |
spellingShingle | Habiburahman SHIRANI Yukinori NAKAMURA Shinji WAKUI Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table Journal of Advanced Mechanical Design, Systems, and Manufacturing pneumatic isolation table supplied air flow disturbance estimated disturbance |
title | Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table |
title_full | Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table |
title_fullStr | Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table |
title_full_unstemmed | Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table |
title_short | Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table |
title_sort | flow disturbance compensation based on off line estimated signal for a pneumatic isolation table |
topic | pneumatic isolation table supplied air flow disturbance estimated disturbance |
url | https://www.jstage.jst.go.jp/article/jamdsm/7/4/7_498/_pdf/-char/en |
work_keys_str_mv | AT habiburahmanshirani flowdisturbancecompensationbasedonofflineestimatedsignalforapneumaticisolationtable AT yukinorinakamura flowdisturbancecompensationbasedonofflineestimatedsignalforapneumaticisolationtable AT shinjiwakui flowdisturbancecompensationbasedonofflineestimatedsignalforapneumaticisolationtable |