Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table

The flow disturbance to a pneumatic vibration isolation table causes periodic fluctuation of the table. In current study, one cycle of flow disturbance is estimated offline using a disturbance observer. The time series data of one cycle estimated disturbance is then stored in the memory of digital s...

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Main Authors: Habiburahman SHIRANI, Yukinori NAKAMURA, Shinji WAKUI
Format: Article
Language:English
Published: The Japan Society of Mechanical Engineers 2013-07-01
Series:Journal of Advanced Mechanical Design, Systems, and Manufacturing
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/jamdsm/7/4/7_498/_pdf/-char/en
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author Habiburahman SHIRANI
Yukinori NAKAMURA
Shinji WAKUI
author_facet Habiburahman SHIRANI
Yukinori NAKAMURA
Shinji WAKUI
author_sort Habiburahman SHIRANI
collection DOAJ
description The flow disturbance to a pneumatic vibration isolation table causes periodic fluctuation of the table. In current study, one cycle of flow disturbance is estimated offline using a disturbance observer. The time series data of one cycle estimated disturbance is then stored in the memory of digital signal processor. The program codes are prepared which can detect every cycle of the flow disturbance based on the threshold of table position. The estimated signal is then repeatedly injected from the memory through a compensator to the servo valve to suppress table fluctuation due to periodic actual flow disturbance. The effectiveness of this method is demonstrated by experimental results.
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spelling doaj.art-e369f010907d41278c58c2636795d3902022-12-22T01:24:23ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542013-07-017449850510.1299/jamdsm.7.498jamdsmFlow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation TableHabiburahman SHIRANI0Yukinori NAKAMURA1Shinji WAKUI2Department of Electronic and Information Engineering, Tokyo University of Agriculture and TechnologyDepartment of Electronic and Information Engineering, Tokyo University of Agriculture and TechnologyDepartment of Electronic and Information Engineering, Tokyo University of Agriculture and TechnologyThe flow disturbance to a pneumatic vibration isolation table causes periodic fluctuation of the table. In current study, one cycle of flow disturbance is estimated offline using a disturbance observer. The time series data of one cycle estimated disturbance is then stored in the memory of digital signal processor. The program codes are prepared which can detect every cycle of the flow disturbance based on the threshold of table position. The estimated signal is then repeatedly injected from the memory through a compensator to the servo valve to suppress table fluctuation due to periodic actual flow disturbance. The effectiveness of this method is demonstrated by experimental results.https://www.jstage.jst.go.jp/article/jamdsm/7/4/7_498/_pdf/-char/enpneumatic isolation tablesupplied airflow disturbanceestimated disturbance
spellingShingle Habiburahman SHIRANI
Yukinori NAKAMURA
Shinji WAKUI
Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table
Journal of Advanced Mechanical Design, Systems, and Manufacturing
pneumatic isolation table
supplied air
flow disturbance
estimated disturbance
title Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table
title_full Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table
title_fullStr Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table
title_full_unstemmed Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table
title_short Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table
title_sort flow disturbance compensation based on off line estimated signal for a pneumatic isolation table
topic pneumatic isolation table
supplied air
flow disturbance
estimated disturbance
url https://www.jstage.jst.go.jp/article/jamdsm/7/4/7_498/_pdf/-char/en
work_keys_str_mv AT habiburahmanshirani flowdisturbancecompensationbasedonofflineestimatedsignalforapneumaticisolationtable
AT yukinorinakamura flowdisturbancecompensationbasedonofflineestimatedsignalforapneumaticisolationtable
AT shinjiwakui flowdisturbancecompensationbasedonofflineestimatedsignalforapneumaticisolationtable