Flow Disturbance Compensation Based on Off-Line Estimated Signal for a Pneumatic Isolation Table
The flow disturbance to a pneumatic vibration isolation table causes periodic fluctuation of the table. In current study, one cycle of flow disturbance is estimated offline using a disturbance observer. The time series data of one cycle estimated disturbance is then stored in the memory of digital s...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2013-07-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/7/4/7_498/_pdf/-char/en |